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    Created: June 16, 2021


    Last Verified: Over 60 days ago

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    Key Item Details

    Condition: As Is

    Product ID: 39654

    Wafer Sizes:

    Vintage: 2004


    No description available


    Voltage:208 VOLTS208 VOLTS Frequency:50/60 HERTZ50/60 HERTZ Phase:33 Current:60 AMPS60 AMPS Recommended Packaging Form:CUSTOM PALLETCUSTOM PALLET Dimensions: StandardMetric Overall:51 x 81 x 80 IN - 3000 LBS1295.40 x 2057.40 x 2032.00 mm - 1360.80 kg

    OEM Model Description

    The SAT, or Spray Acid Tool, applies corrosive and caustic process media to semiconductor wafers for removal of various contaminants, including particles, metals, organic material, oxides and chemical films. It also provides extremely uniform etching performance. The SAT is a manually loaded system, running batches of 25 wafers and performing sequential processing whereby the process media is brought to the semiconductor wafers and delivered as a spray. It is offered in one, two and three chamber models.

    Other Information
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