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Created: June 16, 2021
Last Verified: Over 60 days ago
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Condition: As Is
Product ID: 39654
No description available
Voltage:208 VOLTS208 VOLTS Frequency:50/60 HERTZ50/60 HERTZ Phase:33 Current:60 AMPS60 AMPS Recommended Packaging Form:CUSTOM PALLETCUSTOM PALLET Dimensions: StandardMetric Overall:51 x 81 x 80 IN - 3000 LBS1295.40 x 2057.40 x 2032.00 mm - 1360.80 kg
The SAT, or Spray Acid Tool, applies corrosive and caustic process media to semiconductor wafers for removal of various contaminants, including particles, metals, organic material, oxides and chemical films. It also provides extremely uniform etching performance. The SAT is a manually loaded system, running batches of 25 wafers and performing sequential processing whereby the process media is brought to the semiconductor wafers and delivered as a spray. It is offered in one, two and three chamber models.
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