Veeco Bruker Wyko SP9900 Large Format Optical Surface Profiler. Automated non-contact 3D critical dimension measurements. Large format surface profiling system delivers unmatched measurement performance on substrate panels, bumped substrates, flat panels and circuit boards for improved process monitoring and increased yields. High resolution imaging and patented vertical scanning interferometry system can perform accurate 3D critical dimension measurements with nanometer resolution. Powerful surface metrology instrument and defect inspection tool. Measurement Capability: Non-contact, three dimensional, surface, critical dimension, film thickness, tribology. Vertical Measurement Range: 0.1nm to 10mm. Vertical Resolution: Less than 0.1nm. RMS Repeatability: 0.01nm. No Cognex system. 115/230V, 1 Ph, 50/60 Hz, CE. Mfg.: 2008.
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