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ULVAC NE-950EX

Created On
June 30th, 2020
Guaranteed Accurate as of
2 months ago
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June 30th, 2020
2 months ago
Favorite
Copied!
Share
Make
ULVAC
Model
NE-950EX
Category
Etchers & Ashers
Quantity
3
Serial Number
-
Vintage
2011
Wafer Size
6"
Condition
As-Is
Other Information
Configuration
Form : Load Lock Type Configuration : Atmospheric Transfer Chamber Load Lock Chamber Transfer Chamber Process chamber Transfer device : Bernoulli transport Substrate size : dia.330 trays (dia.150 Wafer × 3) Process Power : Antenna RF 2 kW (13.56 MHz)            Bias RF 2 kW (12.5 MHz) Process Gas : 8 gas systems (CHF3, Cl2, BCl3, etc.)   Vacuum Pump : DRP × 2
Description
-
Model Description
-
Services Available for this Listing
Moov Insurance
Installation
Refurbished
Various / Other
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