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THERMOFISHER SCIENTIFIC / FEI / PHILLIPS STRATA DB 235
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:14711

    Wafer Sizes:Unknown

    Vintage:2002

    Description

    No description available

    Configuration

    • FEG Electron column with Schottky FEG, 350v–30kV • In lens SE and BSE detector • Magnum ion column with Ga 69/71 LMIS, 5–30kV • Milling Power: 21nA beam current • CDEM • Windows OS and FEI UI; TSS networking computer to make IT happy • Five-axis motorized compucentric stage • XYZ: 50 x 50x 10 mm • Tilt: – 10° to + 60°, Rotation: n x 360° • Sample load: front door or load lock • Chamber scope for real time observation • Gas Injection System (GIS): Max 4 injectors 2 included, chemistry of choice • Vacuum System, oil free IGP x 3, air cooled Turbo and dry PVP

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    OEM Model Description

    The FEI Strata DB 235 is a dual-beam system that combines the capabilities of a focused ion beam (FIB) and a scanning electron microscope (SEM). It features both a Hexalens electron column and a Magnum ion column, making it well-suited for failure analysis and high-end sample preparation. The SEM component uses a Schottkey emitter and operates at 200-300 kV, while the FIB component uses Gallium liquid metal and operates at 5 to 30 kV with a current range of 1pA to 20 nA. The system offers high resolution, with 3 nm for SEM and 7 nm for FIB. It is controlled by the Window NT system and can perform automated TEM sample preparation. An attached EDAX electron dispersive X-ray analysis system allows for chemical analysis. Additionally, the FIB/SEM has the unique ability to add or remove material with high spatial resolution between precisely defined locations.

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