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TEL / TOKYO ELECTRON TRIAS HIGH-k
    Description
    No description
    Configuration
    CVD System, 12” <45nm process 2 Chambers: CVD & ALD Process: NiOx, HfOx Trias cluster: 2 Loadports LM: Front end Main power distribution (MPD) Transfer module, TM EX reactor, PM2: Plasma capability: No Includes: Ozonizer & H20 Box 2 Touch screens ozonizer High-k CVD reactor PM4: Thermal based deposition Transformer box (Hi-K) option elec box: Manuals & Spareparts included Machine is in absolute as good as new condition ex R&D facility PM2: Hafnium Nickel Titaan Vanadium PM4: Hafnium Nickel Titaan Ruthenium Strontium
    OEM Model Description
    Trias High-k CVD system is a 300mm single-wafer cluster tool designed to produce thin-film materials required for the advanced gate stack, which will be incorporated in the most advanced semiconductor devices at the 45nm node and beyond.
    Documents
    File icon

    Tokyo Electron Trias Hi.docx

    TEL / TOKYO ELECTRON

    TRIAS HIGH-k

    verified-listing-icon

    Verified

    CATEGORY

    CVD (Metalization)
    Last Verified: Over 60 days ago
    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    39978

    Wafer Sizes:

    12"/300mm

    Vintage:

    2010

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
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    TEL / TOKYO ELECTRON TRIAS HIGH-k
    TEL / TOKYO ELECTRONTRIAS HIGH-kCVD (Metalization)
    Vintage: 2010Condition: Used
    Last VerifiedOver 60 days ago

    TEL / TOKYO ELECTRON

    TRIAS HIGH-k

    verified-listing-icon

    Verified

    CATEGORY

    CVD (Metalization)
    Last Verified: Over 60 days ago
    listing-photo-839571758a794d1d8aa3fc12fd940b18-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1148/839571758a794d1d8aa3fc12fd940b18/ee3bac8a89a844eabb7ff8bea2c6e62b_d9a9802520a940b7a88999a9e74a358c_mw.jpeg
    listing-photo-839571758a794d1d8aa3fc12fd940b18-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1148/839571758a794d1d8aa3fc12fd940b18/2e1e234ec43b4de19f5202359a2afdbc_486551c7eacc44dea23ebb67cbc35611_mw.jpeg
    listing-photo-839571758a794d1d8aa3fc12fd940b18-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1148/839571758a794d1d8aa3fc12fd940b18/b540e01e78934e08926afba54f8f73ff_5a5b64dbf2814ca5aa24d258912685181201a_mw.jpeg
    listing-photo-839571758a794d1d8aa3fc12fd940b18-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1148/839571758a794d1d8aa3fc12fd940b18/91626fecf21348cdb0cbfe6c9d16996b_0cedca63f6c6491883343c678815c1a4_mw.jpeg
    listing-photo-839571758a794d1d8aa3fc12fd940b18-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1148/839571758a794d1d8aa3fc12fd940b18/7e6f08bfcba14420ae58791fa0e45cfc_1ba5c20fa9a34020a3badc06550020f545005c_mw.jpeg
    listing-photo-839571758a794d1d8aa3fc12fd940b18-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1148/839571758a794d1d8aa3fc12fd940b18/e5ead384045241f9b273a13ed41ad3d8_49660dd4508448649ce5a2d39a94f1fd_mw.jpeg
    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    39978

    Wafer Sizes:

    12"/300mm

    Vintage:

    2010

    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    No description
    Configuration
    CVD System, 12” <45nm process 2 Chambers: CVD & ALD Process: NiOx, HfOx Trias cluster: 2 Loadports LM: Front end Main power distribution (MPD) Transfer module, TM EX reactor, PM2: Plasma capability: No Includes: Ozonizer & H20 Box 2 Touch screens ozonizer High-k CVD reactor PM4: Thermal based deposition Transformer box (Hi-K) option elec box: Manuals & Spareparts included Machine is in absolute as good as new condition ex R&D facility PM2: Hafnium Nickel Titaan Vanadium PM4: Hafnium Nickel Titaan Ruthenium Strontium
    OEM Model Description
    Trias High-k CVD system is a 300mm single-wafer cluster tool designed to produce thin-film materials required for the advanced gate stack, which will be incorporated in the most advanced semiconductor devices at the 45nm node and beyond.
    Documents
    File icon

    Tokyo Electron Trias Hi.docx

    Similar Listings
    View All
    TEL / TOKYO ELECTRON TRIAS HIGH-k
    TEL / TOKYO ELECTRON
    TRIAS HIGH-k
    CVD (Metalization)Vintage: 2010Condition: UsedLast Verified: Over 60 days ago