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TEL / TOKYO ELECTRON TELFORMULA ALD HIGH-K
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:21485

    Wafer Sizes:12"/300mm

    Vintage:Unknown

    Description

    No description available

    Configuration

    Process: ALDZROX 2.2- General Specification:  Safety Specification - SEMI S2-0703 - Qty 1 Heater Model - Mid-Temp. VCM-50-012L - Qty 1 Software Version (WAVES) - Ver.2.12 R008 - Qty 1 3.1.1- Furnace Spec, Furnace:  Loading Area Light - White (LED) - Qty 1 3.1.3- Furnace Spec, Furnace Facilities:  Furnace Exhaust Connection Point - Top Connection - Qty 1 Cooling Water Connection Point - Bottom Connection - Qty 1 Air Intake Point - Top - Qty 1 3.2.1- Gas Spec,  Gas Distribution System:  IGS Type - IGS 1.125"W-Seal rail-mount - Qty 1 IGS Maker - Fujikin - Qty 1 Tubing Bends - Bend (Less than 90deg) - Qty 1 IGS Final Filter - PALL - Qty 1 IGS Regulator - CKD - Qty 1 IGS MFC (Maker/Type) - HORIBA STEC / Digital - Qty 1 IGS MFC for low flow N2 purge when cleaning - HORIBA STEC / SEC-G111 - Qty 1 IGS Press. Transducer - Nagano - Qty 1 3.2.2- Gas Spec,  Gas Facilities:  Incoming Gas Connection Point - Bottom Connection - Qty 1 Gas VENT Connection Point - Bottom Connection - Qty 1 Exhaust VENT Connection Point - Bottom Connection - Qty 1 Gas Unit Exh Connection Point - Bottom Connection - Qty 1 3.3.1- Exhaust Specification:  Vacuum Gage - Press Ctrl - MKS (Hot) Capacitance Manometer - Qty 1 Vacuum Gage - Press Monitor (133kPa) - MKS (Hot) Capacitance Manometer - Qty 1 Vacuum Gage - Pump Monitor - MKS (Hot) Capacitance Manometer - Qty 1 Main Valve - CKD / Valve: VEC-VH8-X0110    Controller: VYX-0279-CONT - Qty 1 3.4.1- Reactor Specification:  Cap Heater - Yes - Qty 1 3.6.1- Interface Specification, Factory Automation System:  Load Port Operation - Lower + Upper - Qty 1 PIO I/F Location - FNC Top - Qty 1 PIO Maker/Model - Hokuyo / DMS-HB1-Z - Qty 1 Carrier ID Reader Writer Type - RF - Qty 1 3.6.2- Interface Specification, User Interface:  Signal Tower Model - LCE Series - Qty 1 Signal Tower Colors - Red / Blue / Yellow / Green - Qty 1 Signal Tower Location - Front for 10 Stocker (Left) - Qty 1 Front Operation Panel - Yes - Qty 1 MMI and Gas FlowChart - Gas Box & Front Operation Panel Installed - Qty 1 Light Curtain - None - Qty 1 Indicator Type - HOKUYO DMS-HB1-Z series - Qty 1 Operator Switch - Operator Access / White Cover with Orange Light - Qty 1 Pressure Display Unit - MPa / Torr - Qty 1 Cabinet Exh Pressure Display - Pa - Qty 1 3.7.1- Other Specification, Unit Location:  Furnace (Exh/Box,Gas/Box inclu - Main-Fab - Qty 1 Power Box - Sub-Fab - Qty 1 Pump - Sub-Fab - Qty 1 RCU - Sub-Fab - Qty 1 7.0- Attached List:  Signal Tower Special Sequence - Rev.1 - Qty 1 Quartzware List - Rev.1 - Qty 1 Gas Layout Drawing Parts List:  HAND VALVE - NX1,  KE11, FB11, KE21, FB21 - Qty 5 - FUNSDL-21GT-6.35UGC - FUJIKIN HAND VALVE - XZ11 - Qty 1 - FUNSDL-21GT-6.35UGC-ST-PA - FUJIKIN FILTER - NX1 - Gasket Filter - Qty 1 - CNF1004USG4 - PALL FILTER - NX2, N12, N32, N42, N62, N72, N82, N92 - Qty 8 - GTMF3700F4A - PALL REGULATOR - NX - Qty 1 - PGM-H-60-5-1 - CKD REGULATOR - NY,N1 - Qty 2 - PGM-50-5 - CKD PRESSURE TRANSMITTER - NX, NY, XZ4, N9, N6, N5, NA, NC, N2,N1 - Qty 10 - ZT16-ZW1-D71100(-0.1-0.5MPA) - NAGANO KEIKI MASS FLOW CONTROLLER - NX - Qty 1 - Z522MGXNC-14W2 N2 50SLM - STEC MASS FLOW CONTROLLER - NY, N1 - Qty 2 - Z512MGXC-14W2 N2 500SCCM - STEC MASS FLOW CONTROLLER - N2, N5, N6, N9, NA, NC - Qty 6 - Z512MGXC-14W2 N2 3SLM - STEC MASS FLOW CONTROLLER - N3, N4, N7, N8 - Qty 4 - Z522MGXNC-14W2 N2 20SLM - STEC MASS FLOW CONTROLLER - NXZ2 - Qty 1 - Z522MGXNC-14W2 N2 30SLM - STEC MASS FLOW CONTROLLER - NXZ1 - Qty 1 - Z511XC-14W2 N2 500SCCM - STEC AIR OPERATE VALVE - NX1, NY1, N11, N21, N31, N41, N62, N71 - CV valve 0.2 - Qty 8 - FPR-PHSD-21-6.35UGC - FUJIKIN AIR OPERATE VALVE - N81, N92, NA1, NXZ11, NXZ21 - CV valve 0.2 - Qty 5 - FPR-PHSD-21-6.35UGC - FUJIKIN AIR OPERATE VALVE - N52, NC2 - CV valve 0.2 with P.S. - Qty 2 - FPR-PHSD-21LS2-6.35UGC - FUJIKIN AIR OPERATE VALVE - XZ11-13 - CV valve 0.2 - Qty 1 - FBPHSDL-6.35UGC-2B3-ST-PA-DVD - FUJIKIN AIR OPERATE VALVE - XZ12 - CV valve 0.2 with P.S. - Qty 1 - FPR-PHSDT-21LS2-6.35UGC-ST-PA - FUJIKIN AIR OPERATE VALVE - XZ14 - CV valve 0.2 - Qty 1 - FPR-PHSD-21-6.35UGC-ST-PA - FUJIKIN AIR OPERATE VALVE - XZ15 - CV valve 0.2 - Qty 1 - FBPHSDL-6.35UGC-1B3-ST-PA-DVD - FUJIKIN "AIR OPERATE VALVE - FB1C-1B - CV value 0.2 W-BLOCK - Qty 1 - FBPHSDL-6.35UGC-2B3-DVD - FUJIKIN" AIR OPERATE VALVE - FB2C, FB19, FB29 - CV valve 0.2 - Qty 3 - FBPHSDL-6.35UGC-1B3-DVD - FUJIKIN AIR OPERATE VALVE - KE11-13, FB11-13, KE21-23, FB21-23 - CV value 0.2 with P.S. - Qty 2 - FBPHSDL-LS22-6.35UGC-2B3-DVD - FUJIKIN CHECK VALVE - XZ14, XZ13, XZ23 - Qty 3 - FUNCDF-21-6.35UGC-KA - FUJIKIN BAKING UNIT - LSC-F530 - TMA 500sccm - Qty 1 - LSC-F530-751GS - STEC OZONIZER - OZONIZER - CUSTOMER SUPPLY - Qty 1 - OP-500H-RE1 - TMEIC AIR OPERATE VALVE - NG1-IP1-NP1, NG7-NP7-IP7 - NP with P.S. - Qty 2 - FBNHDL-FS202-9.52X6.35-3B4-PA-NFQ - FUJIKIN AIR OPERATE VALVE - NG2 - Qty 1 - FPR-UDDF-81-9.52X6.35-2-NL-PA-LUA-UP - FUJIKIN AIR OPERATE VALVE - NG4 - Qty 1 - FPR-UDDF-81-9.52X6.35-2-ST-PA-LUA-UP - FUJIKIN AIR OPERATE VALVE - NG5 - Qty 1 - FPR-UDDF-81-9.52-2-NL-PA-LUA-UP - FUJIKIN AIR OPERATE VALVE - NP4 - WITH P.S - Qty 1 - FPR-SDT-71RSB2-6.35-3-ST-PA-LUZ - FUJIKIN AIR OPERATE VALVE - NP5 - WITH P.S - Qty 1 - FPR-SDT-71RSB2-9.52X6.35-3-PA-LUZ - FUJIKIN AIR OPERATE VALVE - Z19 - WITH P.S - Qty 1 - HBV-8VF-NC-BA-R-PEEK - IHARA AIR OPERATE VALVE - KE19, KE29 - Qty 2 - FPR-SD-71-6.35UG-PA - FUJIKIN AIR OPERATE VALVE - KE1A, KE2A - Qty 2 - FPR-SDT-71-6.35UGSX6.35-3-PA-LWA - FUJIKIN AIR OPERATE VALVE - Z16,Z26 - WITH P.S - Qty 2 - FPR-SDT-71RSB2-6.35UGSX6.35-3-PA-LWA - FUJIKIN AIR OPERATE VALVE - N63, N93 - WITH P.S - Qty 2 - FPR-SD-71RSB2-6.35-2-PA-LUA - FUJIKIN HAND VALVE - NG2 - Qty 1 - FUDDFL-71-6.35-UP - FUJIKIN HAND VALVE - NG5 - Qty 1 - FUDDFL-71-9.52-NL-PA-UP - FUJIKIN FILTER - Z11, Z12, Z21, Z22 - Qty 4 - CNF1004UPSG6 - PALL VAPORIZER SYSTEM - TL-2014 - ZAC - Qty 2 - TL-2014AL-06U-00-E - STEC PRESSURE GAUGE - FB1 - Qty 1 - EMD7D3P1D100 - YAMAMOTO DENKI SPEED CONTROLLER - FB1 - Qty 1 - AS1002F-06 - SMC MASS FLOW CONTROLLER - NR1, NR2 - Qty 2 - G111AMC-4CR-SUC N2 500sccm - STEC FILTER - NR1, NR2 - Gasket Filter - Qty 2 - GSG-V4-1-N - MOTT AIR OPERATE VALVE - NR11, NR12-1, NR12-2 - Qty 3 - FPR-SD-71-6.35#A - FUJIKIN HAND VALVE - HV1, HV2 - Qty 2 - FUBFL-71-9.52-2-PA-BR - FUJIKIN HAND VALVE - HV3, HV4 - Qty 2 - FUBFL-71-9.52-PA - FUJIKIN AIR OPERATE VALVE - IV1 - WITH P.S - Qty 1 - FPR-71RS1-9.52-PA#A - FUJIKIN AIR OPERATE VALVE - IV7 - WITH P.S - Qty 1 - FPR-71RS1-9.52-2-PA-BR#A - FUJIKIN AIR OPERATE VALVE - IV8 - WITH P.S - Qty 1 - HBV-8VF-NC-BA-R-PEEK - IHARA AIR OPERATE VALVE - IV2 - Qty 1 - FP-71RS1-9.52-2-PA-BR#A - FUJIKIN AIR OPERATE VALVE - VV1, VV2 - Qty 2 - FPR-71-9.52-2-PA-BR#A - FUJIKIN AIR OPERATE VALVE - SSV1 - Qty 1 - FPR-71-6.35-2-PA-BR#A - FUJIKIN NEEDLE VALVE - NV1 - Qty 1 - FUBFN-71-6.35-DFZ - FUJIKIN CHECK VALVE - CV1 - Qty 1 - IC8-1/3-VUA-48 - KITZ "CYLINDER VALVE - MV - APC - Qty 1 - VEC-VH8-X0110 (Controller:VYX-0276-CONT) - CKD" CAPACITANCE MANOMETER - VG1 - HOT TYPE (150C) - Qty 1 - 631D02T8FHBB - MKS CAPACITANCE MANOMETER - VG2, P.SW21 - HOT TYPE (150C) - Qty 1 - 631D13T8FHBB - MKS CAPACITANCE MANOMETER - VG3 - HOT TYPE (150C) - Qty 1 - 631D11T8FHBB - MKS CAPACITANCE MANOMETER - VG4 - HOT TYPE (200C) - Qty 1 - 631D11T8FPBB - MKS PRESSURE SWITCH - ATM-P.SW11-1 - Qty 1 - 223B-22809 - MKS DRY PUMP UNIT - M.B. P/D.P - CUSTOMER SUPPLY - Qty 1 - IXH1820 - EDWARDS BALL VALVE - BV21, BV22 - Qty 2 - G-353011 - IHARA REGULATOR - RG21, RG22 - Qty 2 - RC2000-X0005 - CKD PRESSURE GAUGE - PG21, PG22 - Qty 2 - G49D-6-P10-P9 - CKD FLOW CONTROL SYSTEM - FCNL1-LA1, LA2 - Qty 1 - KHT-X0038-FL326735 - CKD FLOW METER - NFA, NFB - Qty 2 - KHT-X0033-FL326730 - CKD "AIR OPERATE VALVE - PB1-NVNFA PB2-NVNFB - Qty 2 - AGD21V-6RJ-FC - CKD" FILTER - NL12,  - Qty 1 - N-400 PTFE(BA) 1/2" VCR L74 - NIPPON SEISEN STOP VALVE - BV23, BV24, BV25 - Qty 3 - 3QV-06-06 - CKD REGULATOR - RG23-24-25 - Qty 1 - MNRB500B-SLC6-3-D - CKD PRESSURE SWITCH - P.SW1, P.SW2 - Qty 2 - PPD3-R10P-6B - CKD FLOW METER - NFZ - Qty 1 - XP-G5-U0 - TOKYO KEISO Missing/Damaged Parts List: None report, please inspect tool to reconfirm

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