Description
DIFF Asset HDD not includedConfiguration
Software Version (include revision#): Ver 2.02 System Power Rating: 400VAC 3-Phase for system Loading Configuration: 2 load positions for furnace or dual auto-indexer loaders Process Unit: QuartzTwin Quartz Twin Boat Controller: WAVES MFC/Pressure Unit: HORIBA STEC / Digital Drive Mechanisms: Motor drive FOUP Opener: N/A Gas System: Integrated Gas Exhaust System: System N/AOEM Model Description
The Alpha-303i is a 300mm production tool developed by Tokyo Electron. It is the result of years of research and development, with TEL having completed their 300mm batch furnace prototype in 1995. Since then, TEL has delivered numerous atmospheric and LP CVD systems to multiple customer sites and consortia worldwide. The Alpha-303i includes key features such as a 100 product wafer load size, a high-speed multiple-wafer loading system with optical notch alignment, and a Front-Opening Unified Pod (FOUP) interface that is configurable for overhead transfer systems (OHT) and personal guided vehicles (PGV). Additionally, boat rotation is standard on all processes, and a Fast Thermal Processing System (FTP) is available for both atmospheric and CVD systems. This tool reinforces TEL’s commitment to being production ready for the 300mm era of semiconductor manufacturing.Documents
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TEL / TOKYO ELECTRON
ALPHA(α)-303i
Verified
CATEGORY
Furnaces / Diffusion
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
32922
Wafer Sizes:
12"/300mm
Vintage:
2014
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Refurbishment Services
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TEL / TOKYO ELECTRON
ALPHA(α)-303i
Verified
CATEGORY
Furnaces / Diffusion
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
32922
Wafer Sizes:
12"/300mm
Vintage:
2014
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
DIFF Asset HDD not includedConfiguration
Software Version (include revision#): Ver 2.02 System Power Rating: 400VAC 3-Phase for system Loading Configuration: 2 load positions for furnace or dual auto-indexer loaders Process Unit: QuartzTwin Quartz Twin Boat Controller: WAVES MFC/Pressure Unit: HORIBA STEC / Digital Drive Mechanisms: Motor drive FOUP Opener: N/A Gas System: Integrated Gas Exhaust System: System N/AOEM Model Description
The Alpha-303i is a 300mm production tool developed by Tokyo Electron. It is the result of years of research and development, with TEL having completed their 300mm batch furnace prototype in 1995. Since then, TEL has delivered numerous atmospheric and LP CVD systems to multiple customer sites and consortia worldwide. The Alpha-303i includes key features such as a 100 product wafer load size, a high-speed multiple-wafer loading system with optical notch alignment, and a Front-Opening Unified Pod (FOUP) interface that is configurable for overhead transfer systems (OHT) and personal guided vehicles (PGV). Additionally, boat rotation is standard on all processes, and a Fast Thermal Processing System (FTP) is available for both atmospheric and CVD systems. This tool reinforces TEL’s commitment to being production ready for the 300mm era of semiconductor manufacturing.Documents
No documents
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