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RITE TRACK / ASML / SVG 8826
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:15024

    Wafer Sizes:Unknown

    Vintage:Unknown

    Description

    No description available

    Configuration

    SVG Rite Track 8826-28-36 88 Series Dual Track Photoresist Coater and Developer. Fully automated system designed to uniformly coat wafers. Configuration - Track 1: Elevator, Robot, Spinner, Robot, Hot Plate, Robot, Elevator. Track 2: Elevator, Robot, Hot Plate, Robot, Chill Plate, Robot, Spinner, Robot, Elevator.  Controls - SVG-8826 SMC/8836HPO Coater, RT 8828/8836 HPO Developer, Two Rite Track digital temperature controllers TC1000. Does not include photoresist pumps or developer tanks.

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