Description
300mm RTPConfiguration
Mattson, Helios, 300mm, RTP !!!Multiple Units Available!!!Please inquireOEM Model Description
Helios family RTP systems offer unique double-side heating RTP technology. It can achieve the highest wafer temperature ramp rate while balancing wafer frontside and backside temperatures, eliminate pattern-loading effect, provide unique wafer stress management capabilities, satisfy technical requirements for RTP processes with different substrate thickness and device structures, and achieve the highest system productivity at the same time.Documents
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MATTSON
HELIOS
Verified
CATEGORY
RTP/RTA
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
15399
Wafer Sizes:
12"/300mm
Vintage:
Unknown
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Logistics Support
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Money Back Guarantee
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Transaction Insured by Moov
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Refurbishment Services
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MATTSON
HELIOS
Verified
CATEGORY
RTP/RTA
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
15399
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
300mm RTPConfiguration
Mattson, Helios, 300mm, RTP !!!Multiple Units Available!!!Please inquireOEM Model Description
Helios family RTP systems offer unique double-side heating RTP technology. It can achieve the highest wafer temperature ramp rate while balancing wafer frontside and backside temperatures, eliminate pattern-loading effect, provide unique wafer stress management capabilities, satisfy technical requirements for RTP processes with different substrate thickness and device structures, and achieve the highest system productivity at the same time.Documents
No documents