Verified
Etch/Asher
Last Verified:Over 60 days ago
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Refurbishment
Need a tool built to the required specifications? Moov's refurbishment team has over 20 years of experience.
Verified
Last Verified:Over 60 days ago
Condition:Refurbished
Operational Status:
Product ID:17005
Wafer Sizes:8"/200mm
Vintage:2007
No description available
SPTS MPX ICP SR ETCHER consisting of: - Model: MPX ICP - Process: SiC, III-V, or Metal Etch - Single process chamber with manually loaded vacuum loadlock, with carousel wafer handler 2 wafers - Inductively Coupled Plasma Source (ICP) - Currently Configured for 4"/100mm Wafers - Capable of processing up to 8"/200mm wafers - Carousel Load Lock (2-Wafer Carousel) - Heated Lower Chamber - Load-Lock Chamber - Helium Substrate Backside Cooling - Weighted Clamp - ESR20N Vacuum Pump (Chamber) - Alcatel Adixen ACP 40 Vacuum Pump (Load Lock) - SMC Thermco Chiller - E-Rack - MKS Spectrum 3KW 13.56MHz RF Generator (Source) - 13.56MHz RF Generator (Lower Electrode) - Leybold MAG 1500CT Turbo Pump - System Cables (full set) - SPTS System Software - Verity Instruments End Point Detector - User Manuals & Documentation - Year of Manufacture: 2007 - Serial Number: MPO582 On Board Gas Box with Following Gas Configuration: - O2 @ 50 SCCM - C4F8 @ 200 SCCM - SF6 @ 200 - Ar @ 200 SCCM - He @ 200 SCCM - CF4 @ 200 SCCM - CHF3 @ 200 SCCM - NF3 @ 200 SCCM FULLY REFURBISHED SYSTEM MEETING ORIGINAL SPECIFICATIONS: - Chamber disassembled for refurbishment. - Chamber received full wet clean. - Chamber o-rings and seals are replaced with brand new. - Electrostatic Chuck (ESC) sent out for refurbishment (if applicable) - All MFCs rebuilt and calibrated professionally. - All corrosive gas lines replaced with brand new. - All Non-corrosive gas lines purged. - Vacuum pumps professionally rebuilt. - Turbo pump professionally rebuilt. - Chillers serviced and fully tested. - All wiring/wire harnesses are checked, repaired or replaced if needed. - All liquid and air lines, tubing and fittings checked and replaced if necessary. - Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed. - Checkout of all electronic and mechanical parts. - Machine covers are cleaned, polished or replaced as needed. - Post-refurbishment system leak and RF calibration checks, with documentation provided to customer. - System cycle and repeatability testing completed prior to cover replacement and wipe down. - A software license may be obtained directly from SPTS - SPTS does not certify any third party equipment refurbishments - System components carefully packed, labeled, and professionally crated.
MultiPlex ICP
Verified
Last Verified:Over 60 days ago
Condition:Refurbished
Operational Status:
Product ID:17005
Wafer Sizes:8"/200mm
Vintage:2007
No description available
SPTS MPX ICP SR ETCHER consisting of: - Model: MPX ICP - Process: SiC, III-V, or Metal Etch - Single process chamber with manually loaded vacuum loadlock, with carousel wafer handler 2 wafers - Inductively Coupled Plasma Source (ICP) - Currently Configured for 4"/100mm Wafers - Capable of processing up to 8"/200mm wafers - Carousel Load Lock (2-Wafer Carousel) - Heated Lower Chamber - Load-Lock Chamber - Helium Substrate Backside Cooling - Weighted Clamp - ESR20N Vacuum Pump (Chamber) - Alcatel Adixen ACP 40 Vacuum Pump (Load Lock) - SMC Thermco Chiller - E-Rack - MKS Spectrum 3KW 13.56MHz RF Generator (Source) - 13.56MHz RF Generator (Lower Electrode) - Leybold MAG 1500CT Turbo Pump - System Cables (full set) - SPTS System Software - Verity Instruments End Point Detector - User Manuals & Documentation - Year of Manufacture: 2007 - Serial Number: MPO582 On Board Gas Box with Following Gas Configuration: - O2 @ 50 SCCM - C4F8 @ 200 SCCM - SF6 @ 200 - Ar @ 200 SCCM - He @ 200 SCCM - CF4 @ 200 SCCM - CHF3 @ 200 SCCM - NF3 @ 200 SCCM FULLY REFURBISHED SYSTEM MEETING ORIGINAL SPECIFICATIONS: - Chamber disassembled for refurbishment. - Chamber received full wet clean. - Chamber o-rings and seals are replaced with brand new. - Electrostatic Chuck (ESC) sent out for refurbishment (if applicable) - All MFCs rebuilt and calibrated professionally. - All corrosive gas lines replaced with brand new. - All Non-corrosive gas lines purged. - Vacuum pumps professionally rebuilt. - Turbo pump professionally rebuilt. - Chillers serviced and fully tested. - All wiring/wire harnesses are checked, repaired or replaced if needed. - All liquid and air lines, tubing and fittings checked and replaced if necessary. - Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed. - Checkout of all electronic and mechanical parts. - Machine covers are cleaned, polished or replaced as needed. - Post-refurbishment system leak and RF calibration checks, with documentation provided to customer. - System cycle and repeatability testing completed prior to cover replacement and wipe down. - A software license may be obtained directly from SPTS - SPTS does not certify any third party equipment refurbishments - System components carefully packed, labeled, and professionally crated.
MultiPlex ICP
Moov goes beyond the transaction to ensure a seamless buying experience from start to finish.
Money Back Guarantee
Let Moov take the risk out of purchasing secondhand equipment with our 'No questions asked Money Back Guarantee' Learn more
Logistics
One stop shop for Moov-ing equipment anywhere globally.
Insurance
Moov-ing equipment can be risky. Let us take on that risk so you can relax while your equipment is in transit.
Refurbishment
Need a tool built to the required specifications? Moov's refurbishment team has over 20 years of experience.