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Marketplace > Polishing and Grinding > SPEEDFAM > 9B-5
SPEEDFAM 9B-5
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:49929

    Wafer Sizes:Unknown

    Vintage:Unknown

    Description

    Double Side Machine

    Configuration

    LP -The machine has one drive motor and one slory motor -Has a flat metal polish plat and put the polish pad on the top of the plat to polish wafers. -Polished GaSb wafers and used them for a very short time under the DOD contract. -The polishers are made in Japan and have a main drive motor and slurry pump motor. -The machine has control for slory during the polishing process.

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