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LAM RESEARCH / SEZ DV-PRIME
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:16689

    Wafer Sizes:Unknown

    Vintage:2007

    Description

    No description available

    Configuration

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    OEM Model Description

    The Da Vinci Prime (DVP) is an advanced single-wafer wet processing platform that combines SEZ’s proven Da Vinci technology with its newest capabilities. It is designed to address the increasing overlap of BEOL and FEOL applications and the emergence of new materials. The DVP features double-sided processing, non-damage defect removal, minimized watermark formation, and multi-chemical recirculation capabilities. It targets a mix of BEOL and FEOL applications and offers key benefits such as maximized throughput, enhanced surface defect removal, and reduced media consumption.

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