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SEZ / LAM RESEARCH DV PRIME

Created On
October 26th, 2019
Guaranteed Accurate as of
21 hours ago
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October 26th, 2019
21 hours ago
Favorite
Copied!
Share
Make
SEZ / LAM RESEARCH
Model
DV PRIME
Category
Etchers & Ashers
Quantity
Not In Stock
Serial Number
-
Vintage
2012
Wafer Size
12"
Condition
As-Is
Other Information
Configuration
Process : SWC Tool config is based on original PO, please verify tool details at tool inspection DV-PRIME SYSTEM Equipment Platform: DV-Prime Standard Wafer Size: 300mm Are Left/Right Sides Same: No Process Module Left Section: LS Process Module Right Section: LS Packaging Standard Packaging SEMI E137 Non-Standard Requests (NSR) SCR140913 FRPP corpus material SCR140177 Hot DI module SCR132272 KFPI fire supression system SCR140446 Drain switch in top level SCR140447 PSL2 DNH4OH and DI:TMAH (ICHC 2 left for DNH4OH 14:1 to 18:1, 65 C, DI:TMAH 5:1 to 20:1 75-80 C with analyzer and DI and NH4OH spiking) SCR140448 PSR2 DNH4OH and SC1 (ICHC 2 right for DNH4OH 14:1 to 18:1 65 C, SC1 1:4:130 and 2:3:100, 65 C with analyzer and spiking for DI and NH4OH) SCR140449 CHC-F DHF 100:1-1200:1 (CHC F for DHF 100:1 to 1200:1 21-25 C for right side top level with anlyzer and capative leak sensor (same floor), double contaiment box) SCR140661 Implement ASD3+ 0,145 l/min SCR140662 DHF over ASD3 and AJ arm need SCR140663 DHF89:10-121:10 29 C ICHC1L (DHF 89:10 to 121:10 at 29 C in ICHC 1 left with analyzer ) SCR140664 DHF5:1-50:1 21-29 C ICHC1R (DHF 5:1 to 50:1 ICHC 1 right 21 to 29 C with analyzer for 5:1 to 20:1) SCR140665 1:1cut out template&facilitysh (1:1 cut out template and customized facility data sheet for MU and external modules) SCR140666 Preparation for ASD AT retrofi DV-PRIME PROCESS SECTION LEFT Chemistries for DVP: DHF NSR LS Process Module Options **Chemical Assignment** . Medium Level 3 dHF Medium Dispenser Double Side Filter Preparation No Preparation Mix System None (premixed) Medium Level 2 Customized Chemistry Medium Level 2 details DNH40H AND DI:TMAH Medium Dispenser Double Side Dispense Mode Drain & Recirculation Medium Level 1 dHF Medium Dispenser Double Side Dispense Mode Drain & Recirculation **Process Features** . Dry Step N2 Dry Active Jet V5.2 with DIW (simultaneous) CO2 Injection DI/CO2 Water Additional Features Automatic Clean Emergency Rinse, Analog Exhaust Monitoring **Process Module** . Chuck Drive Unit Double Side Chuck Type DS Conductive Chuck PCTFE Chuck Spin Speed 300-2000rpm Process Chamber Exhaust Triple Exhaust Air-Vent Exhaust Switch Level 3 Yes Exhaust Connector Exhaust Down Drain Selection Level 3 Facility & Cabinet 1 dHF Chemistry Options **Chemical Cabinet_1** . Medium Tank PVDF 40l Mix System Mix System NSR Temperature Control 6 kW Inline Heater with Cooler Filter Preparation Chemlock Filter Housing Filter Type Intercept HPM 0.05 Process Pump High Flow & Viscosity Chemistry Options Medium Sample Port Drain Pump Low Temperature Cabinet Drain PVDF Drain Customized Chemistry Options **Chemical Cabinet_2** . Medium Tank PFA 40l Mix System Mix System NSR Chemical Analyzer External Analyzer Interface Temperature Control 2x6 kW Inline Heater Filter Preparation Quick Change CoreVent Filter Type QuickChangeCoreVent ATM 0.05 Process Pump Pump with Exhaust Ventilation Chemistry Options Medium Sample Port Drain Pump Low Temperature Cabinet Drain PP Drain DV-PRIME PROCESS SECTION RIGHT Chemistries for DVP: DHF NSR LS Process Module Options **Chemical Assignment** . Medium Level 3 dHF Medium Dispenser Double Side Filter Preparation No Preparation Mix System None (premixed) Medium Level 2 Customized Chemistry Medium Level 2 details DI:NH4OH,SC1 Medium Dispenser Double Side Dispense Mode Drain & Recirculation Medium Level 1 dHF Medium Dispenser Double Side Dispense Mode Drain & Recirculation **Process Features** . Dry Step N2 Dry Active Jet V5.2 with DIW (simultaneous) CO2 Injection DI/CO2 Water Additional Features: Automatic Clean Emergency Rinse Analog Exhaust Monitoring **Process Module** . Chuck Drive Unit Double Side Chuck Type DS Conductive Chuck PCTFE Chuck Spin Speed 300-2000rpm Process Chamber Exhaust Triple Exhaust Air-Vent Exhaust Switch Level 3 Yes Exhaust Connector Exhaust Down Drain Selection Level 3 Facility & Cabinet 1 dHF Chemistry Options **Chemical Cabinet_1** . Medium Tank PVDF 40l Mix System Mix System NSR Temperature Control 6 kW Inline Heater with Cooler Filter Preparation Chemlock Filter Housing Filter Type Intercept HPM 0.05 Process Pump High Flow & Viscosity Chemistry Options Medium Sample Port Drain Pump Low Temperature Cabinet Drain PVDF Drain Customized Chemistry Options **Chemical Cabinet_2** . Medium Tank PFA 40l Mix System Mix System NSR Chemical Analyzer External Analyzer Interface Temperature Control 18 kW Inline Heater Filter Preparation Quick Change CoreVent Filter Type QuickChangeCoreVent ATM 0.05 Process Pump Pump with Exhaust Ventilation Chemistry Options Medium Sample Port Drain Pump Low Temperature Cabinet Drain PP Drain DV-PRIME SYSTEM PLATFORM Number of Loadports & Robots 3 Loadports with 1 Robot Loadport Type TDK Carrier ID Reader RF Reader E84 I/O for OHT Yes Software Options SEMI E116 OHT Loading in Upper Position CO2 Generator 2-50 /cm DI Water Supply 1x8PM - Booster Pump+Press Reg DIW Filtration System Chemlock Intercept Power Distribution Box PDB 400V CE Power Requirements 120 kVA Transformer 208V-400V Installation Material PDB Cable Kit 30 Meter Platform Doors Doors With Windows System Lighting White Light Add. Leak Detection Capacitive Sensors (4pcs) Accessories Service Laptop Video System Video Display & Recording DV-PRIME EXTERNAL MODULES **CBM-B** . Quantity None (House Supply) **Chemical Analyzer** . Analyzer Cabinet No DV-PRIME SOFTWARE Medium Exchanger Top-Up Function Automatic Bath-Exchange Damage/Missing parts list Dry pumps are not included with sales Please inspect tool to reconfirm
Description
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Model Description
-
Services Available for this Listing
Moov Insurance
Installation
Refurbished
Various / Other
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