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SAMCO PD-3800LT
    Description
    No description
    Configuration
    Form : Load lock Type (Large tray transfer) Substrate Size : 3 ""6"" Wafer (trays : φ 360 Al ) Configuration : Reaction chamber (SUS304 φ 495) Transfer chamber (SUS304 800 x 780) Electrodes : φ 420 mm (aluminum) / Top & Bottom Heating : Stage Heating 300°C Power supply : RF 500 W 13.56MHz Process Gas : 6 systems (SiH4, N2O, CF4, CoF2…) Transfer Robot : Articulated Arm Vacuum Robots (JEL) Vacuum Pump : Dry Pump HR60 (ULVAC) Control system : sequencer Operating inputs : touch panel Recipe : Max. 15 recipes or more
    OEM Model Description
    None Provided
    Documents

    No documents

    SAMCO

    PD-3800LT

    verified-listing-icon

    Verified

    CATEGORY

    PECVD
    Last Verified: Over 60 days ago
    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    26125

    Wafer Sizes:

    Unknown

    Vintage:

    Unknown

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    SAMCO PD-3800LT
    SAMCOPD-3800LTPECVD
    Vintage: 2011Condition: Used
    Last VerifiedOver 60 days ago

    SAMCO

    PD-3800LT

    verified-listing-icon

    Verified

    CATEGORY

    PECVD
    Last Verified: Over 60 days ago
    listing-photo-f5fad40a4e0f41de9b6f9d4ddc8d4a1e-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    26125

    Wafer Sizes:

    Unknown

    Vintage:

    Unknown

    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    No description
    Configuration
    Form : Load lock Type (Large tray transfer) Substrate Size : 3 ""6"" Wafer (trays : φ 360 Al ) Configuration : Reaction chamber (SUS304 φ 495) Transfer chamber (SUS304 800 x 780) Electrodes : φ 420 mm (aluminum) / Top & Bottom Heating : Stage Heating 300°C Power supply : RF 500 W 13.56MHz Process Gas : 6 systems (SiH4, N2O, CF4, CoF2…) Transfer Robot : Articulated Arm Vacuum Robots (JEL) Vacuum Pump : Dry Pump HR60 (ULVAC) Control system : sequencer Operating inputs : touch panel Recipe : Max. 15 recipes or more
    OEM Model Description
    None Provided
    Documents

    No documents

    Similar Listings
    View All
    SAMCO PD-3800LT
    SAMCO
    PD-3800LT
    PECVDVintage: 2011Condition: UsedLast Verified: Over 60 days ago