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Plasma SA 2000

Created On
March 15th, 2019
Guaranteed Accurate as of
2 months ago
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March 15th, 2019
2 months ago
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Make
Plasma
Model
SA 2000
Category
Etchers & Ashers
Quantity
1
Serial Number
-
Vintage
-
Wafer Size
8"
Condition
As-Is
Other Information
Configuration
  <table border="1" cellpadding="0" cellspacing="0" style="width: 0px;"><tbody><tr><td colspan="1" rowspan="1" style="width: 229px;"> <h1>General System Info</h1> </td><td colspan="1" rowspan="1" style="width: 114px;"> <h1>Select or Fill In</h1> </td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Date of Audit</span></td><td colspan="1" rowspan="1" style="width: 114px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Fab Equipment ID</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;">PSS-A3</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"> </td><td colspan="1" rowspan="1" style="width: 114px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Manufacturer (Make)</span></td><td colspan="1" rowspan="1" style="width: 114px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Model</span></td><td colspan="1" rowspan="1" style="width: 114px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Serial Number</span></td><td colspan="1" rowspan="1" style="width: 114px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"> </td><td colspan="1" rowspan="1" style="width: 114px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Wafer Size (inches)</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;"> 8 </span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Install Type: TTW / Stand-Alone</span></td><td colspan="1" rowspan="1" style="width: 114px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"> </td><td colspan="1" rowspan="1" style="width: 114px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">OEM MFG Date</span></td><td colspan="1" rowspan="1" style="width: 114px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Install Date</span></td><td colspan="1" rowspan="1" style="width: 114px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Date of Last PM</span></td><td colspan="1" rowspan="1" style="width: 114px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Is System On-Line?</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;"> No</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Off-Line Date (if applicable)</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;">2018/01/14</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Can Produce Wafers As-Is ?</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;">  No</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"> </td><td colspan="1" rowspan="1" style="width: 114px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">CE Mark Certified ?</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;">Yes  /  No</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Are any Manuals included ?</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;">Std </span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">OEM Audit Available?</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;"> No</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">3<sup>rd</sup> Party Audit Available ?</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;"> No</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Decontamination Report Exists?</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;">Yes  /  No</span></td></tr></tbody></table>   <table border="1" cellpadding="0" cellspacing="0" style="width: 0px;"><tbody><tr><td colspan="1" rowspan="1" style="width: 229px;"><b><span style="font-family: arial,sans-serif;">Overall Tool Condition</span></b></td><td colspan="1" rowspan="1" style="width: 114px;"><b><span style="font-family: arial,sans-serif;">Select</span></b></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Any Field Modifications ?</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;">Yes  </span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">All Cables present ?</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;">Yes  </span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Any Corrosion visible on modules ?</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;">  No</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Any Missing / Damaged Parts ?</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;">Yes  </span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Shipping Brackets Included ?</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;">Yes  </span></td></tr></tbody></table>   <table border="1" cellpadding="0" cellspacing="0" style=""><tbody><tr><td colspan="1" rowspan="1" style="width: 229px;"><b><span style="font-family: arial,sans-serif;">Wafer Handler</span></b></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;"> No</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Handler Type</span></td><td colspan="1" rowspan="1" style="width: 114px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;"># of Cassette / FOUP Loaders</span></td><td colspan="1" rowspan="1" style="width: 114px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Robot Type</span></td><td colspan="1" rowspan="1" style="width: 114px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">End-Effecter Type</span></td><td colspan="1" rowspan="1" style="width: 114px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Pre-Aligner ?</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;">Yes  /  No</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Mini-Environment</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;">Yes  </span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Handler Options ?</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;">NA</span></td></tr></tbody></table>   <table border="1" cellpadding="0" cellspacing="0" style="width: 0px;"><tbody><tr><td colspan="1" rowspan="1" style="width: 229px;"><b><span style="font-family: arial,sans-serif;">System Software</span></b></td><td colspan="1" rowspan="1" style="width: 114px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">System SW (OS) version</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;">unknown</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">System SW (App) version</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;">unknown</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Log-In User Name</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: pmingliu,serif;">亮雲</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Log-In Password</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: pmingliu,serif;">SA</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Any SW Options ?</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;">NA</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">SEMI Std Options (E84, E99, etc..)</span></td><td colspan="1" rowspan="1" style="width: 114px;"> </td></tr></tbody></table>   <table border="1" cellpadding="0" cellspacing="0" style=""><tbody><tr><td colspan="1" rowspan="1" style="width: 229px;"><b><span style="font-family: arial,sans-serif;">Communication Interface</span></b></td><td colspan="1" rowspan="1" style="width: 114px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">GEM / SECS ?</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;">SECS</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">HSMS</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;">NA</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Serial </span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;">NA</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Ethernet</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;">Y</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 229px;"><span style="font-family: arial,sans-serif;">Other ?</span></td><td colspan="1" rowspan="1" style="width: 114px;"><span style="font-family: arial,sans-serif;">NA</span></td></tr></tbody></table>     <table border="1" cellpadding="0" cellspacing="0" style=""><tbody><tr><td colspan="1" rowspan="1" style="width: 181px;"><b><span style="font-family: arial,sans-serif;">Supporting Equipment</span></b></td><td colspan="1" rowspan="1" style="width: 181px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">Power Supply</span></td><td colspan="1" rowspan="1" style="width: 181px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">AC Dist Box</span></td><td colspan="1" rowspan="1" style="width: 181px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">Ext Transformer</span></td><td colspan="1" rowspan="1" style="width: 181px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">UPS</span></td><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">NA</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">Heat Exchanger / Chiller</span></td><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">NA</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">Backing Pump(s)</span></td><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">EBARAx2</span></td></tr></tbody></table>     <table border="1" cellpadding="0" cellspacing="0" style=""><tbody><tr><td colspan="1" rowspan="1" style="width: 181px;"><b><span style="font-family: arial,sans-serif;">Facility Requirements</span></b></td><td colspan="1" rowspan="1" style="width: 181px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">CDA</span></td><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">70 PsiG/min</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">DIW</span></td><td colspan="1" rowspan="1" style="width: 181px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">Vacuum</span></td><td colspan="1" rowspan="1" style="width: 181px;"> </td></tr><tr><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">Gas</span></td><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">2 – 4 Kg/ cm2</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">Power </span></td><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">208V100A</span></td></tr></tbody></table>       <b><span style="font-family: arial,sans-serif;">Missing/Damaging parts list:</span></b> <table border="1" cellpadding="0" cellspacing="0" style=""><tbody><tr><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">Parts</span></td><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">Quantity</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">Quartz  x 1</span></td><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">Damaging</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">Matcher x 1</span></td><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">Damaging</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">ISO x 1</span></td><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">No</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">Throttle valve  x 1</span></td><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">No</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">Screen x1</span></td><td colspan="1" rowspan="1" style="width: 181px;"><span style="font-family: arial,sans-serif;">No</span></td></tr><tr><td colspan="1" rowspan="1" style="width: 181px;"> </td><td colspan="1" rowspan="1" style="width: 181px;"> </td></tr></tbody></table>
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