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NOVA NOVASCAN 3090

Created On
March 15th, 2019
Guaranteed Accurate as of
a year ago
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March 15th, 2019
a year ago
Copied!
Share
Product ID
16239
Make
NOVA
Model
NOVASCAN 3090
Category
Metrology
Quantity
1
Serial Number
-
Vintage
-
Wafer Size
12"
Condition
As-Is
Other Information
Configuration
Process: METROOCD SW:4.5r6b65 for windows         Wafer Size: 300mm   SEMI Notch Carrier:  Three front-end load port         a. 8 user-configurable LEDs to display the loadport status         b. Load/unload button for manual delivery hand-off         c. Cassette / wafer mapping which allows the tool to generate a wafer map of the 300mm FOUP and detect wafer presence, empty slots and cross-slotted wafer. The wafer map can be displayed on the user screen and sent to a SECS host.         Three load/unload button for manual docking                  Interlocks:  Safety Interlock for open panel/\ Safety Interlock for laser         Facilities     Power: 200-240VAC, 50/60 Hz, 20 Amp breaker         Vac: > 24" Hg, >1.2 SCFM     NT Front-End Module; DOS Measurement Module.    Included         Integrated Mini-Environment.    Included         DOS computer system with the following minimum features: Pentium III CPU, 2048 MB RAM Memory         IMS application software     NT computer system with the following minimum features Pentium III CPU         2048 MB memory (RAM)         mouse         HSMS / GEM SEMI E37 compliant Ethernet interface: CP/IP protocol to communicate with the factory SECS host         Software: Automation Software Support for SEMI E40, E87, E90 & E94         Complete database and SPC tracking     Wafer Handling    n/a     Precision x-y-theta wafer stage n/a Pattern Recognition    n/a         Interface    Rear user interface with rear disk drives (floppy, CD and PCMCIA)     Missing/Damaged Parts List: Please inspect tool to reconfirm Dry pumps not included on sales    
Description
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Listings information displayed on Moov.co is not a representation or warranty of any kind, and has been provided to us or extracted directly from the various suppliers and sources. Unless stated otherwise, Moov has not independently verified this information.
Services Available for this Listing
Moov Insurance
Installation
Refurbished
Various / Other
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OEM Model Description
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