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NIDEC SANKYO SR8220-019
    Description
    DIC DIC Calibrations Gem/SECS(comm port) Gem/SECS(HSMH) Oblique XY coordinates
    Configuration
    Install Type: Bulkhead System / ASYST LPT 2200 SW: Envision Mainframe: TCP9600 SE (CFE) WVDS On-Board AC Dist On-Board RF Generators: (3) Onboard AE RFG 1250 SECS Interface Main Process Module (PM1): TCP 9600SE Wafer Clamp: ESC w/He Cooling Electrode Gap:Fixed gap amp, TCP Coil, Turbo 1000 Seiko Seiki incl controller Gate Valve: VAT 64 Heated Pump Stack; Manifold; Endpoint Detection: Dual Photo diode; EndpointWavelength(s): 703nm and 261.8nm; PM2: Hinged DSQ Stripper; Gas Box Config; Orbitally Welded Gas Box, Backside Helium Cooling, Gas Line 1 2 4 5 6 7 8, Gas Flow (sccm), Cl2 100, BCL3 100, CH4 10, N2 10, O2 200, O2 500, H20 500 Power Requirements: 208V, 80A, 3-Phase, Freq 50/60Hz
    OEM Model Description
    None Provided
    Documents

    No documents

    NIDEC SANKYO

    SR8220-019

    verified-listing-icon

    Verified

    CATEGORY

    Electronic Test
    Last Verified: Over 60 days ago
    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    23790

    Wafer Sizes:

    Unknown

    Vintage:

    2008

    Have Additional Questions?
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    Transaction Insured by Moov
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    NIDEC SANKYO

    SR8220-019

    verified-listing-icon

    Verified

    CATEGORY

    Electronic Test
    Last Verified: Over 60 days ago
    listing-photo-927065f3e14b4f1f9052636724767dfc-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1097/23790/c774cc705e1f4722b4549cf8264dca09_4_m.jpeg
    listing-photo-927065f3e14b4f1f9052636724767dfc-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1097/23790/38c7bf8f6eab41f88c4da81b64fb9b0a_2_m.jpeg
    listing-photo-927065f3e14b4f1f9052636724767dfc-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1097/23790/f4de454bee6249948eb1f2dea78932e9_1_m.jpeg
    listing-photo-927065f3e14b4f1f9052636724767dfc-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1097/23790/e703f24d0c73430eb9451e1827213bab_5_m.jpeg
    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    23790

    Wafer Sizes:

    Unknown

    Vintage:

    2008

    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    DIC DIC Calibrations Gem/SECS(comm port) Gem/SECS(HSMH) Oblique XY coordinates
    Configuration
    Install Type: Bulkhead System / ASYST LPT 2200 SW: Envision Mainframe: TCP9600 SE (CFE) WVDS On-Board AC Dist On-Board RF Generators: (3) Onboard AE RFG 1250 SECS Interface Main Process Module (PM1): TCP 9600SE Wafer Clamp: ESC w/He Cooling Electrode Gap:Fixed gap amp, TCP Coil, Turbo 1000 Seiko Seiki incl controller Gate Valve: VAT 64 Heated Pump Stack; Manifold; Endpoint Detection: Dual Photo diode; EndpointWavelength(s): 703nm and 261.8nm; PM2: Hinged DSQ Stripper; Gas Box Config; Orbitally Welded Gas Box, Backside Helium Cooling, Gas Line 1 2 4 5 6 7 8, Gas Flow (sccm), Cl2 100, BCL3 100, CH4 10, N2 10, O2 200, O2 500, H20 500 Power Requirements: 208V, 80A, 3-Phase, Freq 50/60Hz
    OEM Model Description
    None Provided
    Documents

    No documents

    Similar Listings
    View All

    No Similar Listings