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LAM RESEARCH / NOVELLUS CONCEPT 2 DUAL ALTUS-S

Created On
March 15th, 2019
Guaranteed Accurate as of
25 days ago
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March 15th, 2019
25 days ago
Copied!
Share
Product ID
23776
Make
LAM RESEARCH / NOVELLUS
Model
CONCEPT 2 DUAL ALTUS-S
Category
Reactors / MOCVD
Quantity
Not In Stock
Serial Number
-
Vintage
2013
Wafer Size
8"/200mm
Condition
As-Is
Other Information
Configuration
• Currently configured for 200mm (8 in) wafer sizes • MFG Date: 2013 • Install Type: Stand-Alone • CE Mark Certified • Electrical Requirements : 208V • Serial Numbers:     DLCM : DLCM-104     Module A : ALT-122     Module B : ALT-123     Module C : NA     • Wafer specification: o Size: 200mm o Shape: SNNF (Semi Notch, no flat) • DLCM: o DLCM Type: DLCM-S o Robot: Brooks Mag-7 o Signal Lamp Tower o Module Controller: MC1 o GEMS o Integrated SMIF : Yes       SMIF Loader Make/Model : Asyst / LPT2200 • Process Module: o Process Type: Altus-S Tungsten CVD/PNL o Altis Chamber Items      o PNL Hardware : Yes       B2H6 MFC : Yes  o Gate Valve Mfg & Model : VAT o RF Generator: (2) AE RFG-3000 • Gas Pallet: Gas Line #    Gas    Flow (sccm)   MFC Mfgr.   MFC Model 1          AR(D)    5000          AERA      9800 2          SIH4(D)    250          AERA      9800 3          H2    20000          AERA      9800 4          AR(W)    20000          AERA      9800 5          WF6(W)    750          AERA      9800 6          C2F6    2000          AERA      9800 7          O2    2000          AERA      9800 8          AR(C)    10000          AERA      9800 9          H2    20000          AERA      9800 10          AY(Y)    10000          AERA      9800 11          B2H6(D)    500          AERA      9800 12          AR(J)    10000          AERA      9800 13          AR(H)    20000          AERA      9800 14          WF6(J)    500          AERA      9800 15          SIH4(X)    250          AERA      9800 16          N2(W)    250          AERA      9800 17          AR(X)    10000          AERA      9800 18          B2H6(X)    400          AERA      9800 19          WF6(Y)    500          AERA      9800 • Dry Pumps:  o Load Lock Pump: Alcatel ADP122 o Transfer Chamber Pump: Alcatel ADP122 o Chamber Pump: Alcatel ADP1202/ADP122 • RF Generator Rack : Yes  • SSD : Yes  • Gas Abatement: Not included • Damage / Missing Parts: o None Reported, Please inspect to confirm  
Description
-
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