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LAM RESEARCH CORPORATION 2300 VERSYS KIYO
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:19105

    Wafer Sizes:12"/300mm

    Vintage:2009

    Description

    No description available

    Configuration

    Process: POLYETCH <span style="color: rgb(62, 62, 60);">Tool config is based on original PO, please verify tool details at tool inspection</span> FI SN: 1017439-09-51-0428Chamber SN: 23KY-1075 (F124526-PM1), 23KY-1076 (F124526-PM2), 23KY-1077 (F124526-PM3), 23KY-1078 (F124526-PM4) System Type   Complete System   1   2300 Version 2 (4 VPM)   V2 platform supports up to 4 process chambers.   1   Wafer Size   300 mm wafers   1   Wafer Config   SEMI   1   Cassette Type   25 Slot Cassette   1   Process Module Position and Quantity   2300 Versys Kiyo (PM1,2,3,4)   4   Gas Box Type   IGS Gas Box   4   Chamber Type   Versys Kiyo   4   Chamber Pinnacle   Standard Pinnacle (-814)   4   Wafer Clamping Mechanism   Center RF, Tunable ESC (-374)   4   RF Strap   RF Coupling Strap   4   RF Ground Bracket   Standard Fingers (-006)   4   Edge Ring   Quartz (EBP)   4   Injector   Alt 1 Injector (-026)   4   Injector Shield   Standard Injector Shield   4   Plasma Screen   Enhanced (-035)   4   Gas Weldment   Original (-103)   4   ESC Hose Kit   Low Temp   4   ESC Facility Plate   Compression Facility Plate   4   Liner   ACME Coated Universal (-838)   4   Chamber Manometer   Standard   4   Wafer Lift Mechanism   Prime Movers   4   Voltage Control Interface   1200V   4   O-rings   Chemraz   4   TCP Coil   Standard   4   TCP Source   Dual 1500W   4   300MM Turbo Pump   2200 L/s BOCE (Seiko Seiki)   4   Heated Foreline   Heated   4   Heated Foreline Clamp Covers   Yes   4   Endpoint Detection   OES2   4   Chamber Viewport Window   Standard   4   Chamber Isolation Valve   Barrier Seal Door   4   Vacuum Valve   Viton   4   Water Control   Passive RF PCW Control   4   Service Covers   Standard   4   TCU to PM   50ft (Default)   4   Pump to PM   100ft   4   Facilitization   No Gas Interface Box   0   Future PM   Position 1, 2, 3, 4   0   Gas System Exhaust   Top Exhaust   4   Gas Line   16 Gas Configuration   4   Heated Gas Lines   Heated Lines, Pos 1 &amp; 2   4   Gas Line 1   SiCL4 100 sccm - STEC Z313   4   Gas Line 2   CL2 500 sccm - STEC D213   4   Gas Line 3   HBr 500 sccm - STEC D213   4   Gas Line 4   CF4 400 sccm - STEC D213   4   Gas Line 5   O2 500 sccm -STEC D213   4   Gas Line 6   He 500 sccm - STEC Z313   4   Gas Line 7   CH2F2 200 sccm - STEC D213   4   Gas Line 8   Ar 1000 sccm - STEC D213   4   Gas Line 9   HeO2 (30% O2) 50 sccm - STEC Z313   4   Gas Line 10   NF3 1000 sccm - STEC D213   4   Gas Line 11   N2 (Process Grade) 250 sccm - STEC Z313   4   Gas Line 12   SO2 200 sccm - STEC Z313   4   Gas Line 13   NA   0   Gas Line 14   NA   0   Gas Line 15   NA   0   Gas Line 16   NA   0   Gas Box Inlet Option   Regulated Inlet Gas Panel   1   ATM Front End Load Port   3 FOUP BROOKS   4   ATM Cassette ID   Hermos Carrier ID   4   ATM, Factory Automation   OHT PIO Sensor   4   ATM Input Buffer Station   25 Slot   2   ATM, CTC Computer, Storage   Hard Disk Drive - Mirrored   1   VTM Loadlock A   Standard   1   VTM Loadlock B   Standard   1   Subpanel   RPDB   1   Signal Tower   R-O-G-B Signal Tower   1   PM Peripherals: Backing Pumps   ESR100WN   4   EbaraRPDB: Backing Pump CB Sizes   30A   4   TCU Config   YR-8020   4   MaruyamaRPDB: TCU CB Sizes   30A   4   Critical Parts   PCB,VIOP BOARD   4   810-099175-011Critical Parts   VME 7668A CPU board   4   605-109114-001 Critical Parts   ASSY,ENCL,DC CONT   4   853-800087-405Critical Parts   ASSY,ENCL,AC,2300 PM   4   853-800083-346Critical Parts   WDO, GAS, INJ, F SEAL, QRTZ, NSG   4   716-012640-013Critical Parts   Top Chamber ACME Coated   4   715-027638-814Critical Parts   ESC,TUNABLE,COUL,CNTR RF,300MM   4   839-019090-374Critical Parts   PCBA,ESC FILTER, BICEP Q   4   810-495659-304Critical Parts   FRU,ASSY,BIAS MTCH,2300   4   832-038915-001Critical Parts   CA,COAX,RF,HN-90,TO,HN-90,11FT   4   834-036619-011Critical Parts   GEN,APEX,1.5KW,13.56MHz, F47,H,P4,-2000Hz   4   660-032596-214Critical Parts   COUPLER,RF,ESC,BIAS COAX FEED   4   839-046079-002Critical Parts   BRKT,RF GND,BIAS ELECT ASSY   4   715-039685-006Critical Parts   WDO, SAPPHIRE, 25MMX.087   4   716-008608-001Critical Parts   SLV,GND SHLD,TCP GAS INJ,NO Ni   4   715-016744-016Critical Parts   SCRN,PLASMA,DUAL GAS ZONE.2300   4   713-012641-035Critical Parts   Gas Injector Weldment : Stainless   4   839-031197-103Critical Parts   HOSE,DUAL INSUL,ESC TEMP CTRL,RET-SUP   4   839-028991-001Critical Parts   &quot;LIN, 2300, UPR CHMB, COATED(chamber liner)&quot;   4   715-801021-838Critical Parts   LIN, MTG PL, ESC, 300MM   4   714-801511-002Critical Parts   HSG,BIAS ELCTD,300MM (ESC toilet bowl)   4   715-800326-004Critical Parts   MNMTR,ETCH,100MT (MKS 100mT manometer)   4   796-019591-004Critical Parts   MNMTR,2STPT,100 DEG C,KF16,10T (MKS 10Torr manometer)   4   685-097330-006Critical Parts   PIN,FLEX,300MM PIN LFT,.042 (lift pins)   4   715-800621-003Critical Parts   FTG,TUBE,FIXED ORF,CHK VLV,AIR,SMC (pin speed mod)   4   920-058481-002Critical Parts   ACTR,BLWS.PINLIFT,.395 STROKE,   4   790-022848-114Critical Parts   &quot;ASSY,VOLTAGE DETECTOR,ESC,2300Z1SY,VOLTAGE/DET,ESC,2300,10-8&quot;   4   853-002499-007Critical Parts   ASSY, S/G COIL, 1.5T OUT, 2T IN   4   853-031436-103Critical Parts   GEN,APEX,1.5KW,13.56MHz, F47,H,P4+2000Hz   4   660-032596-213Critical Parts   FRU,ASSY.ENCL.TCP MTCH,KIYO 23   4   832-034908-009Critical Parts   CA,COAX,RF,HN-90,TO,HN-90,18FT   4   834-036619-018Critical Parts   PMP,TURBO,2.2K L/S,ISO 250-F,T   4   796-900373-003Critical Parts   KIT,HEATERS,FORELINE, SEIKO 2200,IGS   4   857-000178-015Critical Parts   SPEC. OES2, ENDPOINT, VS70-S98   4   685-069171-002Critical Parts   WDO,QUARTZ   4   716-027740-001Critical Parts   KIT,PM, VAT RKR VLV INSTALL   4   857-083111-005Critical Parts   KIT,PM DR, VAT RCKR VLV,BARRIER   4   857-083115-001Critical Parts   GTV,CONT,250 MM FLG,SER 65,VAL   4   796-901160-009Critical Parts   O-RING, ARMOR CRYSTAL, 10.484 ID X .139W   4   734-112249-275Critical Parts   XDCR.PRESS,-15 TO 235 PSIG,T3,NO DISPLAY   4   771-036638-003 Damage/Missing parts listPlease inspect tool to reconfirmDry pumps not included on sales   

    Documents
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    OEM Model Description

    The 2300 Versys Kiyo is a manufacturing tool designed for 65 nm and beyond. It provides excellent uniformity and defect control on a reliable wafer transport system. The symmetric chamber and radial tuning features produce uniform etch results for advanced devices. It employs proprietary technology for process repeatability, low defect, and metal contamination results. It supports conventional applications such as gate and shallow trench isolation (STI) and emerging applications such as high k dielectric removal, critical spacer etch, and lithography-enabling etch steps. The system can be upgraded from the 2300 Versys Star, providing an investment-extending strategy.

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