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LAM 2300 KIYO

Created On
October 26th, 2019
Guaranteed Accurate as of
3 months ago
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October 26th, 2019
3 months ago
Favorite
Copied!
Share
Make
LAM
Model
2300 KIYO
Category
Etchers & Ashers
Quantity
1
Serial Number
-
Vintage
2009
Wafer Size
12"
Condition
As-Is
Other Information
Configuration
Process: POLYETCH <span style="color: rgb(62, 62, 60);">Tool config is based on original PO, please verify tool details at tool inspection</span> FI SN: 1017439-09-51-0428Chamber SN: 23KY-1075 (F124526-PM1), 23KY-1076 (F124526-PM2), 23KY-1077 (F124526-PM3), 23KY-1078 (F124526-PM4) System Type   Complete System   1   2300 Version 2 (4 VPM)   V2 platform supports up to 4 process chambers.   1   Wafer Size   300 mm wafers   1   Wafer Config   SEMI   1   Cassette Type   25 Slot Cassette   1   Process Module Position and Quantity   2300 Versys Kiyo (PM1,2,3,4)   4   Gas Box Type   IGS Gas Box   4   Chamber Type   Versys Kiyo   4   Chamber Pinnacle   Standard Pinnacle (-814)   4   Wafer Clamping Mechanism   Center RF, Tunable ESC (-374)   4   RF Strap   RF Coupling Strap   4   RF Ground Bracket   Standard Fingers (-006)   4   Edge Ring   Quartz (EBP)   4   Injector   Alt 1 Injector (-026)   4   Injector Shield   Standard Injector Shield   4   Plasma Screen   Enhanced (-035)   4   Gas Weldment   Original (-103)   4   ESC Hose Kit   Low Temp   4   ESC Facility Plate   Compression Facility Plate   4   Liner   ACME Coated Universal (-838)   4   Chamber Manometer   Standard   4   Wafer Lift Mechanism   Prime Movers   4   Voltage Control Interface   1200V   4   O-rings   Chemraz   4   TCP Coil   Standard   4   TCP Source   Dual 1500W   4   300MM Turbo Pump   2200 L/s BOCE (Seiko Seiki)   4   Heated Foreline   Heated   4   Heated Foreline Clamp Covers   Yes   4   Endpoint Detection   OES2   4   Chamber Viewport Window   Standard   4   Chamber Isolation Valve   Barrier Seal Door   4   Vacuum Valve   Viton   4   Water Control   Passive RF PCW Control   4   Service Covers   Standard   4   TCU to PM   50ft (Default)   4   Pump to PM   100ft   4   Facilitization   No Gas Interface Box   0   Future PM   Position 1, 2, 3, 4   0   Gas System Exhaust   Top Exhaust   4   Gas Line   16 Gas Configuration   4   Heated Gas Lines   Heated Lines, Pos 1 &amp; 2   4   Gas Line 1   SiCL4 100 sccm - STEC Z313   4   Gas Line 2   CL2 500 sccm - STEC D213   4   Gas Line 3   HBr 500 sccm - STEC D213   4   Gas Line 4   CF4 400 sccm - STEC D213   4   Gas Line 5   O2 500 sccm -STEC D213   4   Gas Line 6   He 500 sccm - STEC Z313   4   Gas Line 7   CH2F2 200 sccm - STEC D213   4   Gas Line 8   Ar 1000 sccm - STEC D213   4   Gas Line 9   HeO2 (30% O2) 50 sccm - STEC Z313   4   Gas Line 10   NF3 1000 sccm - STEC D213   4   Gas Line 11   N2 (Process Grade) 250 sccm - STEC Z313   4   Gas Line 12   SO2 200 sccm - STEC Z313   4   Gas Line 13   NA   0   Gas Line 14   NA   0   Gas Line 15   NA   0   Gas Line 16   NA   0   Gas Box Inlet Option   Regulated Inlet Gas Panel   1   ATM Front End Load Port   3 FOUP BROOKS   4   ATM Cassette ID   Hermos Carrier ID   4   ATM, Factory Automation   OHT PIO Sensor   4   ATM Input Buffer Station   25 Slot   2   ATM, CTC Computer, Storage   Hard Disk Drive - Mirrored   1   VTM Loadlock A   Standard   1   VTM Loadlock B   Standard   1   Subpanel   RPDB   1   Signal Tower   R-O-G-B Signal Tower   1   PM Peripherals: Backing Pumps   ESR100WN   4   EbaraRPDB: Backing Pump CB Sizes   30A   4   TCU Config   YR-8020   4   MaruyamaRPDB: TCU CB Sizes   30A   4   Critical Parts   PCB,VIOP BOARD   4   810-099175-011Critical Parts   VME 7668A CPU board   4   605-109114-001 Critical Parts   ASSY,ENCL,DC CONT   4   853-800087-405Critical Parts   ASSY,ENCL,AC,2300 PM   4   853-800083-346Critical Parts   WDO, GAS, INJ, F SEAL, QRTZ, NSG   4   716-012640-013Critical Parts   Top Chamber ACME Coated   4   715-027638-814Critical Parts   ESC,TUNABLE,COUL,CNTR RF,300MM   4   839-019090-374Critical Parts   PCBA,ESC FILTER, BICEP Q   4   810-495659-304Critical Parts   FRU,ASSY,BIAS MTCH,2300   4   832-038915-001Critical Parts   CA,COAX,RF,HN-90,TO,HN-90,11FT   4   834-036619-011Critical Parts   GEN,APEX,1.5KW,13.56MHz, F47,H,P4,-2000Hz   4   660-032596-214Critical Parts   COUPLER,RF,ESC,BIAS COAX FEED   4   839-046079-002Critical Parts   BRKT,RF GND,BIAS ELECT ASSY   4   715-039685-006Critical Parts   WDO, SAPPHIRE, 25MMX.087   4   716-008608-001Critical Parts   SLV,GND SHLD,TCP GAS INJ,NO Ni   4   715-016744-016Critical Parts   SCRN,PLASMA,DUAL GAS ZONE.2300   4   713-012641-035Critical Parts   Gas Injector Weldment : Stainless   4   839-031197-103Critical Parts   HOSE,DUAL INSUL,ESC TEMP CTRL,RET-SUP   4   839-028991-001Critical Parts   &quot;LIN, 2300, UPR CHMB, COATED(chamber liner)&quot;   4   715-801021-838Critical Parts   LIN, MTG PL, ESC, 300MM   4   714-801511-002Critical Parts   HSG,BIAS ELCTD,300MM (ESC toilet bowl)   4   715-800326-004Critical Parts   MNMTR,ETCH,100MT (MKS 100mT manometer)   4   796-019591-004Critical Parts   MNMTR,2STPT,100 DEG C,KF16,10T (MKS 10Torr manometer)   4   685-097330-006Critical Parts   PIN,FLEX,300MM PIN LFT,.042 (lift pins)   4   715-800621-003Critical Parts   FTG,TUBE,FIXED ORF,CHK VLV,AIR,SMC (pin speed mod)   4   920-058481-002Critical Parts   ACTR,BLWS.PINLIFT,.395 STROKE,   4   790-022848-114Critical Parts   &quot;ASSY,VOLTAGE DETECTOR,ESC,2300Z1SY,VOLTAGE/DET,ESC,2300,10-8&quot;   4   853-002499-007Critical Parts   ASSY, S/G COIL, 1.5T OUT, 2T IN   4   853-031436-103Critical Parts   GEN,APEX,1.5KW,13.56MHz, F47,H,P4+2000Hz   4   660-032596-213Critical Parts   FRU,ASSY.ENCL.TCP MTCH,KIYO 23   4   832-034908-009Critical Parts   CA,COAX,RF,HN-90,TO,HN-90,18FT   4   834-036619-018Critical Parts   PMP,TURBO,2.2K L/S,ISO 250-F,T   4   796-900373-003Critical Parts   KIT,HEATERS,FORELINE, SEIKO 2200,IGS   4   857-000178-015Critical Parts   SPEC. OES2, ENDPOINT, VS70-S98   4   685-069171-002Critical Parts   WDO,QUARTZ   4   716-027740-001Critical Parts   KIT,PM, VAT RKR VLV INSTALL   4   857-083111-005Critical Parts   KIT,PM DR, VAT RCKR VLV,BARRIER   4   857-083115-001Critical Parts   GTV,CONT,250 MM FLG,SER 65,VAL   4   796-901160-009Critical Parts   O-RING, ARMOR CRYSTAL, 10.484 ID X .139W   4   734-112249-275Critical Parts   XDCR.PRESS,-15 TO 235 PSIG,T3,NO DISPLAY   4   771-036638-003 Damage/Missing parts listPlease inspect tool to reconfirmDry pumps not included on sales   
Description
-
Model Description
-
Services Available for this Listing
Moov Insurance
Installation
Refurbished
Various / Other
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