Etch/Asher
Last Verified:Over 60 days ago
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Last Verified:Over 60 days ago
Condition:Used
Operational Status:
Product ID:20008
Wafer Sizes:12"/300mm
Vintage:2006
No description available
Process: OX Tool config is based on original PO, please verify tool details at tool inspection FI SN: 101543506310528Chamber SN: 23EX1593(F97589-PM1), 23EXF1594(F97589-PM2), 23EXF1595(F97589-PM3), 23EXF1751(F106896-PM1), Standard SpecsSoftware Revision: 1.7.2 SP2 HF4 CST2Factory Automation: OHT PIO SensorAMHS: AMHS - OHT or manual deliver - Factory InterfaceWafer Size: Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, NotchCarrier: FOUP (Comply with SEMI E47.1 (25wafers))Inter Face: 3 carrier stage (Continuous flow operation)Online Connection: GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)Interface A: Hardware related to EDA Note: This is a cost option.Small Wip Buffer FIX THIS: 4 Station Small Wip Buffer. With Semi compliant MENV and FIMS assembliesUtility Box: Regulator : Air/AR2500(SMC), N2/SQ-420E(VERUFLO), He/SQMICRO(VERIFLO)Utility Box: Manual Valve : OGD20V-6RM-K / OGD10V-4RM-K (CKD)Utility Box: Pressure Gauge : Bourdon GaugePlatform Type: Version 2UPS on system: YesEarth Leakage Breaker: Yes (for Fab 3 only)Gas Box: Transport Module, GIB for 16 lines IGS GBXMonitor: 2 (Flat Panel Display Touch Screen Type, 1; Fromt, 1; Side)Signal Tower: Red/Orange/Green/Blue (Upper Left of Front x1 & Upper right section of loader on maintenance side x1)EMO: Front x2, Rear x6Conditioning Station: NoForeline: Not HeatedSub-panel: Dual Drop Sub-panelInterconnect Cables: TM to sub-panel, 50 ftPump to TCU: 50 ftTCU to PM: 50 ftPM to Pump Interconnect: 50 ftInter Lock: Gas Box Door (I/L Signal is sent to the Factory)Inter Lock: External (When the I/L signal is received from Factory, gas valves are closed) Support Remote UnitsChiller Lower: ATS DEX 20ACoolant: FC3283Chiller Hose: 5/8 ID Braided Stainless FlexRF Generator 2 MHz: Including RF Cable Tru-8743-07 ( 7 ft cable )RF Generator 27 MHz: Including RF Cable Tru-8743-07 ( 7 ft cable )RF Matcher, 2-27 MHz, DFC: RF Matcher, 2-27 MHz, DFCWafer ID Reader: WIDS Bottom ReadCarrier ID Reader: Asyst RF AdvantagEIM Server: EIM Server-One EIM server per 8 frames Hardware ConfigProcess Chb.1,2,3,&4: 2300 Exelan Flex 45 Ready (Without Captive Cam Ring)25 Wafer Input Buffer Station: KIT,JIT<OPT<25 STATION BUFFER,300MMEndpoint type: Optical Emission SpectroscopyESC type: Dual Zone/Flex BipolarFocus ring: Hot Edge, SiHigh-conductance Wap Ring: 4 RingGap: 2.34 cmTMP: ALCATEL ATH,1600MDry Pump: IH600 (EDWARDS) ; Customer SupplyTransfer Module Backing Pump: EPX with N2 Gas ModulePressure Monitor: C/M ( Process Monitor ) 628B01TDE1B (MKS ) 1 TorrPressure Monitor: C/M ( Service Monitor ) 625A-14059 10 TorrPressure Monitor: C/M ( Foreline Monitor ) 625A-14059 10 TorrPressure Monitor: Absolute Pressure switch 75 Torr Lam P/N 768-093959-001Pressure Monitor: Differential Pressure switch Activation 7mm Hg Vac Precision Sensors P/N D48W-14Upper Electrode: Heated Constant Temperature ControlCoolant Temp Monitor Kit: Coolant Temp Monitoring Kit for Top Plate & Lower ElectrodeO-Rings: FluoroSiliconeChamber Isolation Valve: Barrier Seal DoorWafer Lift Mechanism: Direct Drive Gas PositionGas line 1-C4F8 50 sccm- AERA FC-D780CUGas line 2-O2 50 sccm- AERA FC-D780CUGas line 3-CHF3 100 sccm-AERA FC-D780CUGas line 4-CF4 200 sccm-AERA FC-D780CUGas line 5-30% O2/HE 100 sccm-AERA FC-D780CUGas line 6-C4F6 50 sccm- AERA FC-D780CUGas line 7-CH2F2 50 sccm-AERA FC-D780CUGas line 8-CF4 1000 sccm- AERA FC-D780CUGas line 9-H2 1500 sccm- AERA FC-D780CUGas line 10-AR 1000 sccm- AERA FC-D780CUGas line 11-N2 1000 sccm- AERA FC-D780CUGas line 12-O2 3000 sccm- AERA FC-D780CUTuning Gas: 30% O2/HE 50 sccm-AERA FC-D780CU Gas Box ConfigPurge: N2 (Process Grade N2) (Customer Supplied)Filter: Final gas : Mykrolis (P/N WG2FT1RR2)Gas Box Inlet Option: Regulated Inlet Gas PanelNon-standard PM/GB Feature: Enhanced gas box with 12 gas lines.Gas Line Pressure Transducer: Actual pressure transducer WITHOUT digital readoutRegulator: SQMICRO (VERIFLO)Piping: Single Contained Hasteloy Piping (Gas box to Final valve & Exhaust through Gas box)Final Pressure Switch: Absolute Pre Damage/Missing parts listPlease inspect tool to reconfirm
None Provided
Last Verified:Over 60 days ago
Condition:Used
Operational Status:
Product ID:20008
Wafer Sizes:12"/300mm
Vintage:2006
No description available
Process: OX Tool config is based on original PO, please verify tool details at tool inspection FI SN: 101543506310528Chamber SN: 23EX1593(F97589-PM1), 23EXF1594(F97589-PM2), 23EXF1595(F97589-PM3), 23EXF1751(F106896-PM1), Standard SpecsSoftware Revision: 1.7.2 SP2 HF4 CST2Factory Automation: OHT PIO SensorAMHS: AMHS - OHT or manual deliver - Factory InterfaceWafer Size: Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, NotchCarrier: FOUP (Comply with SEMI E47.1 (25wafers))Inter Face: 3 carrier stage (Continuous flow operation)Online Connection: GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)Interface A: Hardware related to EDA Note: This is a cost option.Small Wip Buffer FIX THIS: 4 Station Small Wip Buffer. With Semi compliant MENV and FIMS assembliesUtility Box: Regulator : Air/AR2500(SMC), N2/SQ-420E(VERUFLO), He/SQMICRO(VERIFLO)Utility Box: Manual Valve : OGD20V-6RM-K / OGD10V-4RM-K (CKD)Utility Box: Pressure Gauge : Bourdon GaugePlatform Type: Version 2UPS on system: YesEarth Leakage Breaker: Yes (for Fab 3 only)Gas Box: Transport Module, GIB for 16 lines IGS GBXMonitor: 2 (Flat Panel Display Touch Screen Type, 1; Fromt, 1; Side)Signal Tower: Red/Orange/Green/Blue (Upper Left of Front x1 & Upper right section of loader on maintenance side x1)EMO: Front x2, Rear x6Conditioning Station: NoForeline: Not HeatedSub-panel: Dual Drop Sub-panelInterconnect Cables: TM to sub-panel, 50 ftPump to TCU: 50 ftTCU to PM: 50 ftPM to Pump Interconnect: 50 ftInter Lock: Gas Box Door (I/L Signal is sent to the Factory)Inter Lock: External (When the I/L signal is received from Factory, gas valves are closed) Support Remote UnitsChiller Lower: ATS DEX 20ACoolant: FC3283Chiller Hose: 5/8 ID Braided Stainless FlexRF Generator 2 MHz: Including RF Cable Tru-8743-07 ( 7 ft cable )RF Generator 27 MHz: Including RF Cable Tru-8743-07 ( 7 ft cable )RF Matcher, 2-27 MHz, DFC: RF Matcher, 2-27 MHz, DFCWafer ID Reader: WIDS Bottom ReadCarrier ID Reader: Asyst RF AdvantagEIM Server: EIM Server-One EIM server per 8 frames Hardware ConfigProcess Chb.1,2,3,&4: 2300 Exelan Flex 45 Ready (Without Captive Cam Ring)25 Wafer Input Buffer Station: KIT,JIT<OPT<25 STATION BUFFER,300MMEndpoint type: Optical Emission SpectroscopyESC type: Dual Zone/Flex BipolarFocus ring: Hot Edge, SiHigh-conductance Wap Ring: 4 RingGap: 2.34 cmTMP: ALCATEL ATH,1600MDry Pump: IH600 (EDWARDS) ; Customer SupplyTransfer Module Backing Pump: EPX with N2 Gas ModulePressure Monitor: C/M ( Process Monitor ) 628B01TDE1B (MKS ) 1 TorrPressure Monitor: C/M ( Service Monitor ) 625A-14059 10 TorrPressure Monitor: C/M ( Foreline Monitor ) 625A-14059 10 TorrPressure Monitor: Absolute Pressure switch 75 Torr Lam P/N 768-093959-001Pressure Monitor: Differential Pressure switch Activation 7mm Hg Vac Precision Sensors P/N D48W-14Upper Electrode: Heated Constant Temperature ControlCoolant Temp Monitor Kit: Coolant Temp Monitoring Kit for Top Plate & Lower ElectrodeO-Rings: FluoroSiliconeChamber Isolation Valve: Barrier Seal DoorWafer Lift Mechanism: Direct Drive Gas PositionGas line 1-C4F8 50 sccm- AERA FC-D780CUGas line 2-O2 50 sccm- AERA FC-D780CUGas line 3-CHF3 100 sccm-AERA FC-D780CUGas line 4-CF4 200 sccm-AERA FC-D780CUGas line 5-30% O2/HE 100 sccm-AERA FC-D780CUGas line 6-C4F6 50 sccm- AERA FC-D780CUGas line 7-CH2F2 50 sccm-AERA FC-D780CUGas line 8-CF4 1000 sccm- AERA FC-D780CUGas line 9-H2 1500 sccm- AERA FC-D780CUGas line 10-AR 1000 sccm- AERA FC-D780CUGas line 11-N2 1000 sccm- AERA FC-D780CUGas line 12-O2 3000 sccm- AERA FC-D780CUTuning Gas: 30% O2/HE 50 sccm-AERA FC-D780CU Gas Box ConfigPurge: N2 (Process Grade N2) (Customer Supplied)Filter: Final gas : Mykrolis (P/N WG2FT1RR2)Gas Box Inlet Option: Regulated Inlet Gas PanelNon-standard PM/GB Feature: Enhanced gas box with 12 gas lines.Gas Line Pressure Transducer: Actual pressure transducer WITHOUT digital readoutRegulator: SQMICRO (VERIFLO)Piping: Single Contained Hasteloy Piping (Gas box to Final valve & Exhaust through Gas box)Final Pressure Switch: Absolute Pre Damage/Missing parts listPlease inspect tool to reconfirm
None Provided
Moov goes beyond the transaction to ensure a seamless buying experience from start to finish.
Money Back Guarantee
Let Moov take the risk out of purchasing secondhand equipment with our 'No questions asked Money Back Guarantee' Learn more
Logistics
One stop shop for Moov-ing equipment anywhere globally.
Insurance
Moov-ing equipment can be risky. Let us take on that risk so you can relax while your equipment is in transit.
Refurbishment
Need a tool built to the required specifications? Moov's refurbishment team has over 20 years of experience.