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LAM RESEARCH CORPORATION 2300 EXELAN FLEX EX+
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:20008

    Wafer Sizes:12"/300mm

    Vintage:2006

    Description

    No description available

    Configuration

    Process: OX Tool config is based on original PO, please verify tool details at tool inspection FI SN: 101543506310528Chamber SN: 23EX1593(F97589-PM1), 23EXF1594(F97589-PM2), 23EXF1595(F97589-PM3), 23EXF1751(F106896-PM1), Standard SpecsSoftware Revision: 1.7.2 SP2 HF4 CST2Factory Automation: OHT PIO SensorAMHS: AMHS - OHT or manual deliver - Factory InterfaceWafer Size: Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, NotchCarrier: FOUP (Comply with SEMI E47.1 (25wafers))Inter Face: 3 carrier stage (Continuous flow operation)Online Connection: GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)Interface A: Hardware related to EDA Note: This is a cost option.Small Wip Buffer FIX THIS: 4 Station Small Wip Buffer. With Semi compliant MENV and FIMS assembliesUtility Box: Regulator : Air/AR2500(SMC), N2/SQ-420E(VERUFLO), He/SQMICRO(VERIFLO)Utility Box: Manual Valve : OGD20V-6RM-K / OGD10V-4RM-K (CKD)Utility Box: Pressure Gauge : Bourdon GaugePlatform Type: Version 2UPS on system: YesEarth Leakage Breaker: Yes (for Fab 3 only)Gas Box: Transport Module, GIB for 16 lines IGS GBXMonitor: 2 (Flat Panel Display Touch Screen Type, 1; Fromt, 1; Side)Signal Tower: Red/Orange/Green/Blue (Upper Left of Front x1 & Upper right section of loader on maintenance  side x1)EMO: Front x2, Rear x6Conditioning Station: NoForeline: Not HeatedSub-panel: Dual Drop Sub-panelInterconnect Cables: TM to sub-panel, 50 ftPump to TCU: 50 ftTCU to PM: 50 ftPM to Pump Interconnect: 50 ftInter Lock: Gas Box Door (I/L Signal is sent to the Factory)Inter Lock: External (When the I/L signal is received from Factory, gas valves are closed) Support Remote UnitsChiller Lower: ATS DEX 20ACoolant: FC3283Chiller Hose: 5/8 ID Braided Stainless FlexRF Generator 2 MHz: Including RF Cable Tru-8743-07 ( 7 ft cable )RF Generator 27 MHz: Including RF Cable Tru-8743-07 ( 7 ft cable )RF Matcher, 2-27 MHz, DFC: RF Matcher, 2-27 MHz, DFCWafer ID Reader: WIDS Bottom ReadCarrier ID Reader: Asyst RF AdvantagEIM Server: EIM Server-One EIM server per 8 frames Hardware ConfigProcess Chb.1,2,3,&4: 2300 Exelan Flex 45 Ready (Without Captive Cam Ring)25 Wafer Input Buffer Station: KIT,JIT<OPT<25 STATION BUFFER,300MMEndpoint type: Optical Emission SpectroscopyESC type: Dual Zone/Flex BipolarFocus ring: Hot Edge, SiHigh-conductance Wap Ring: 4 RingGap: 2.34 cmTMP: ALCATEL ATH,1600MDry Pump: IH600 (EDWARDS) ; Customer SupplyTransfer Module Backing Pump: EPX with N2 Gas ModulePressure Monitor: C/M ( Process Monitor ) 628B01TDE1B (MKS ) 1 TorrPressure Monitor: C/M ( Service Monitor ) 625A-14059 10 TorrPressure Monitor: C/M ( Foreline Monitor ) 625A-14059 10 TorrPressure Monitor: Absolute Pressure switch 75 Torr Lam P/N 768-093959-001Pressure Monitor: Differential Pressure switch Activation 7mm Hg Vac Precision Sensors P/N D48W-14Upper Electrode: Heated Constant Temperature ControlCoolant Temp Monitor Kit: Coolant Temp Monitoring Kit for Top Plate & Lower ElectrodeO-Rings: FluoroSiliconeChamber Isolation Valve: Barrier Seal DoorWafer Lift Mechanism: Direct Drive Gas PositionGas line 1-C4F8 50 sccm- AERA FC-D780CUGas line 2-O2 50 sccm- AERA FC-D780CUGas line 3-CHF3 100 sccm-AERA FC-D780CUGas line 4-CF4 200 sccm-AERA FC-D780CUGas line 5-30% O2/HE 100 sccm-AERA FC-D780CUGas line 6-C4F6 50 sccm- AERA FC-D780CUGas line 7-CH2F2 50 sccm-AERA FC-D780CUGas line 8-CF4 1000 sccm- AERA FC-D780CUGas line 9-H2 1500 sccm- AERA FC-D780CUGas line 10-AR 1000 sccm- AERA FC-D780CUGas line 11-N2 1000 sccm- AERA FC-D780CUGas line 12-O2 3000 sccm- AERA FC-D780CUTuning Gas: 30% O2/HE 50 sccm-AERA FC-D780CU Gas Box ConfigPurge: N2 (Process Grade N2) (Customer Supplied)Filter: Final gas : Mykrolis (P/N WG2FT1RR2)Gas Box Inlet Option: Regulated Inlet Gas PanelNon-standard PM/GB Feature: Enhanced gas box with 12 gas lines.Gas Line Pressure Transducer: Actual pressure transducer WITHOUT digital readoutRegulator: SQMICRO (VERIFLO)Piping: Single Contained Hasteloy Piping (Gas box to Final valve & Exhaust through Gas box)Final Pressure Switch: Absolute Pre Damage/Missing parts listPlease inspect tool to reconfirm

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