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KLA SPECTRAFX 100
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    No description
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    Details Attached.
    OEM Model Description
    SpectraFx 100 is KLA-Tencor’s next-gen thin film metrology solution that meets the process control requirements for 90nm devices, including 193nm DUV lithography processes. It supports next-gen and “operator-free” 300mm fabs with advanced automation and tool-to-tool matching capabilities, reducing process development time for advanced materials and accelerating their adoption into volume production. It also enables extensive product wafer monitoring and characterization required to accurately measure advanced thin films. It fully supports SEMI requirements for communication to automation tracks and materials process flow, delivering the precision, stability, and matching required for advanced thin film-measurement applications for 90nm device production. It achieves exceptional tool-to-tool matching and enables the use of a small spot size on product wafers, eliminating the use of monitor wafers.
    Documents
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    KLA- SPECTRA FX100.pdf

    KLA

    SPECTRAFX 100

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    Verified

    CATEGORY

    Defect Inspection
    Last Verified: Over 60 days ago
    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    37321

    Wafer Sizes:

    12"/300mm

    Vintage:

    2003

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    KLA SPECTRAFX 100
    KLASPECTRAFX 100Defect Inspection
    Vintage: 2003Condition: Used
    Last VerifiedOver 60 days ago

    KLA

    SPECTRAFX 100

    verified-listing-icon

    Verified

    CATEGORY

    Defect Inspection
    Last Verified: Over 60 days ago
    listing-photo-4faa85fd8f9a479f82fb3e9945d04656-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1458/e036c31a32484de58cc5b0307c74cf0f/2f0080c09acd471e8e590dc004160c0c_449b7e6e34014135a2eb83a0da7d7bbd1201a_mw.jpeg
    listing-photo-4faa85fd8f9a479f82fb3e9945d04656-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1458/e036c31a32484de58cc5b0307c74cf0f/4cfe245d776145e9866f47289b7951bd_f514c255fcd042788cdcbf0e38dfe2291201a_mw.jpeg
    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    37321

    Wafer Sizes:

    12"/300mm

    Vintage:

    2003

    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    No description
    Configuration
    Details Attached.
    OEM Model Description
    SpectraFx 100 is KLA-Tencor’s next-gen thin film metrology solution that meets the process control requirements for 90nm devices, including 193nm DUV lithography processes. It supports next-gen and “operator-free” 300mm fabs with advanced automation and tool-to-tool matching capabilities, reducing process development time for advanced materials and accelerating their adoption into volume production. It also enables extensive product wafer monitoring and characterization required to accurately measure advanced thin films. It fully supports SEMI requirements for communication to automation tracks and materials process flow, delivering the precision, stability, and matching required for advanced thin film-measurement applications for 90nm device production. It achieves exceptional tool-to-tool matching and enables the use of a small spot size on product wafers, eliminating the use of monitor wafers.
    Documents
    File icon

    KLA- SPECTRA FX100.pdf

    Similar Listings
    View All
    KLA SPECTRAFX 100
    KLA
    SPECTRAFX 100
    Defect InspectionVintage: 2003Condition: UsedLast Verified: Over 60 days ago