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KLA SPECTRAFX 100
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:21036

    Wafer Sizes:12"/300mm

    Vintage:2013

    Description

    No description available

    Configuration

    <b>Tool has been deinstalled and currently in warehouse. For configuration, please inspect to confirm.</b> Tool Model : SPTR8660 Process : METROOCD Software Version : 6.20.30.10105 System Power Rating : 208 AC 1 Phase Loading Configuration : 3 load port System Configuration 1. Handler Unit : 1 2. Metrology Unit : 1

    Documents
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    OEM Model Description

    SpectraFx 100 is KLA-Tencor’s next-gen thin film metrology solution that meets the process control requirements for 90nm devices, including 193nm DUV lithography processes. It supports next-gen and “operator-free” 300mm fabs with advanced automation and tool-to-tool matching capabilities, reducing process development time for advanced materials and accelerating their adoption into volume production. It also enables extensive product wafer monitoring and characterization required to accurately measure advanced thin films. It fully supports SEMI requirements for communication to automation tracks and materials process flow, delivering the precision, stability, and matching required for advanced thin film-measurement applications for 90nm device production. It achieves exceptional tool-to-tool matching and enables the use of a small spot size on product wafers, eliminating the use of monitor wafers.

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