Description
No descriptionConfiguration
Currently configured for 200mm wafer size • Capable of running smaller wafer sizes w/HW change • MFG Date: 2001 • CE Mark • Install Type: Stand-Alone • Cassette Interface: o Open handler with (2) Open Cassette stations PRI/Equipe Wafer Handling Robot w/Dual End-Effector Brooks Pre-aligner: Model PRE-300B-CE • Main Tool: o Spectroscopic Ellipsometer (SE) o Xe - Xenon Light Source o D2 Lamp o Controller Type: PC o Main Computer: 3.5” (1.44MB) Floppy Drive Castlewood Drive (2.2GB) Color VGA Monitor (flat panel) Keyboard/Trackball • Facility Requirements: o CDA o Vacuum (House) o Power: 208VAC, 8.5A, Single Phase, 3-Wire, Freq 50/60 HzOEM Model Description
The ASET-F5x is a thin film metrology system that can measure materials across a continuous wavelength spectrum from 190 nm to 800 nm. It accurately measures complex multi-layer thin film stacks using spectroscopic ellipsometry and precisely measures advanced, ultra-thin gate dielectric films. It provides the accuracy, repeatability, and system-to-system matching required to monitor advanced ICs with geometries as small as 0.1 micron. Its applications include diffusion films/film deposition, CMP, lithography, and etch.Documents
No documents
KLA
ASET-F5x
Verified
CATEGORY
Metrology
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
15666
Wafer Sizes:
Unknown
Vintage:
2001
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Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
ASET-F5x
Verified
CATEGORY
Metrology
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
15666
Wafer Sizes:
Unknown
Vintage:
2001
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Currently configured for 200mm wafer size • Capable of running smaller wafer sizes w/HW change • MFG Date: 2001 • CE Mark • Install Type: Stand-Alone • Cassette Interface: o Open handler with (2) Open Cassette stations PRI/Equipe Wafer Handling Robot w/Dual End-Effector Brooks Pre-aligner: Model PRE-300B-CE • Main Tool: o Spectroscopic Ellipsometer (SE) o Xe - Xenon Light Source o D2 Lamp o Controller Type: PC o Main Computer: 3.5” (1.44MB) Floppy Drive Castlewood Drive (2.2GB) Color VGA Monitor (flat panel) Keyboard/Trackball • Facility Requirements: o CDA o Vacuum (House) o Power: 208VAC, 8.5A, Single Phase, 3-Wire, Freq 50/60 HzOEM Model Description
The ASET-F5x is a thin film metrology system that can measure materials across a continuous wavelength spectrum from 190 nm to 800 nm. It accurately measures complex multi-layer thin film stacks using spectroscopic ellipsometry and precisely measures advanced, ultra-thin gate dielectric films. It provides the accuracy, repeatability, and system-to-system matching required to monitor advanced ICs with geometries as small as 0.1 micron. Its applications include diffusion films/film deposition, CMP, lithography, and etch.Documents
No documents