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OEM Model Description
The Archer 300 LCM includes several features designed to help chipmakers cost-effectively develop and manufacture 2Xnm logic and 1Xnm half-pitch memory devices. The Archer 300 LCM offers precision and measurement speed significantly better than that of its predecessor, the widely-adopted Archer 200, and features in-die metrology capabilities. The Archer 300 LCM can serve as a comprehensive overlay error management solution. Archer 300 is equipped with 12" overlay management system, fully automated overlay measurement module, and 3 load ports.