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KLA 8100XP
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:49393

    Wafer Sizes:4"/100mm, 5"/125mm, 6"/150mm, 8"/200mm

    Vintage:1998

    Description

    CD SEM

    Configuration

    NT Platform System Computer Dell Precision Work Station (Dual Core Processor) Raid Array (2 drive) OS – Windows NT 4.0 Main System Application – 6.1.SR2+ 3 Cassette Stations – Wafer 4” 5” 6” 8” Capable PRI Robot (with Class 1 wafer scanner) and Prealigner Electron Column – E Column Electron Source – Refurbished Scintillator Detector – New Energy Filter – Refurbished Wein Filter Apertures (2 each) – New Quick Pump (Optional)

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    OEM Model Description

    The KLA-Tencor 8100XP CD SEM is a state-of-the-art scanning electron microscope used in semiconductor manufacturing. It enables precise and fast measurements of critical dimensions (CD) in small device geometries. The CD SEM has advanced capabilities for imaging and measuring high aspect ratio features, ensuring optimum device performance. It offers productivity-enhancing features such as high throughput, networking, offline recipe setup, and full system automation.

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