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KLA SURFSCAN 6200
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:25130

    Wafer Sizes:6"/150mm

    Vintage:Unknown

    Description

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    OEM Model Description

    The Surfscan 6200 is a tool that is capable of detecting defects as small as 0.09 µm with an 80% capture rate. It can locate, measure the size of, and count these defects to provide detailed information about the surface being analyzed.

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