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IBS TM200S
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:17433

    Wafer Sizes:Unknown

    Vintage:Unknown

    Description

    VCR Group IBS TM200S ion beam sputtering system is useful for SEM and TEM sample preparation. The IBS/TM200 Ion beam sputter-coating device is equipped with a 200 l/s turbo-molecular pump, an ion-beam gun, a quartz crystal thickness monitor, a four-position target carrier, and a liquid nitrogen cold trap.

    Configuration

    System specifications: Electrical: Interlocked to prevent high voltage shock 110 V AC, 50/ 60 Hz, 15 A 220 V AC, 50/ 60 Hz, 10 A (Optional) Mechanical: Weight: < 500 lbs Size: Approximate overall dimensions 50” H x 24” W x 32” D (chamber lid open) 40” H x 24” W x 32” D (chamber lid closed) Utilities: Argon Gas Flow: 5-10 psi, 1.5 sccm, 99.999 % pure Nitrogen Gas Flow: Turbomolecular Pump bleed Water Flow: 30 GPH, clean water

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