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FORTREND SIO-300-200-2

Created On
March 15th, 2019
Guaranteed Accurate as of
a year ago
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March 15th, 2019
a year ago
Copied!
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Product ID
14792
Make
FORTREND
Model
SIO-300-200-2
Category
Environmental / Climate Chambers
Quantity
1
Serial Number
-
Vintage
2015
Wafer Size
-
Condition
As-Is
Other Information
Configuration
Tool Status:  Out of Service.  Moved to the warehouse. Configuration.  Audit to verify. <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">12” OVEN EFEM  Automation System</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">(200°C System)</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">Model:SIO-300-250-02(Capacity 50 Wafers per system)</span></span></span>   <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">Include:</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">-Stand-keyboard kit</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">-Turn Station</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">-Metal Cassette Buffer Station</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">-4x FOUP Load Port with RFID read/Writer (134.2k RFID)</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">-Wafer Transfer SCARA Robot</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">-Metal Cassette Transfer Robot</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">-Wafers Orientation in Oven = Vertical</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">-Linear Tracks for Robots</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">-Mini-Environment (class 10)</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">-Enclosure</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">-Controller</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">-Metal Cassettes (4X)</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">-2x Fortrend Improved OVEN Chambers</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">    -Capacity 25 wafers each (total 50 Wafers)</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">    -Auto-Door</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">    -Updated Controller</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">    -Maximum Temperature 250°C</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">    -Uniformity ±3.5° C</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">    -Ramp up to 3° C/min</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">    -Cleanliness</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">        - Class 10 for Vertical Wafers</span></span></span>   <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">-IPC (OS Win XP) and Control system</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">-Touch Screen Monitor</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">-Light Tower</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">-EMO</span></span></span> <span style="color: black;"><span style="font-family: courier new;"><span style="font-size: 9.0pt;">-UPS</span></span></span> SECS - GEM Interface  
Description
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