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Marketplace > CMP > EBARA > F-REX300S
EBARA F-REX300S
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:43997

    Wafer Sizes:12"/300mm

    Vintage:2006

    Description

    No description available

    Configuration

    Slurry AC Lane:SSW2000 Slurry BD Lane:PLANERLITE-5106+5501 Cleaning chemicals:AMMONIA(1,2 Wash)+M-02(3 Wash)

    Documents
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    OEM Model Description

    The Ebara FREX 300 S is a 300mm CMP system, featuring a four-head, four-platen design with a three-step clean process. It reliably meets 7nm tech requirements, providing development and production flexibility, and best-in-class reliability and cost of ownership.

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