Description
No descriptionConfiguration
Application: Oxide Polisher: 4 polish turn table Top Ring:AI head GII x4 Load/Unload port:3 Load ports Endpoint: TCM / Optical(S-OPM) Equipped on table B and D Slurry Delivery : Flow control valve With CLC Lines each table AMHS: OHT Operation panel: 3 Touch panels Cleaner module : 3 cleaner and 1 dryer stations Cleaner Type: Horizontal Type Dryer: Spin Rinse DrOEM Model Description
The Ebara FREX 300 S is a 300mm CMP system, featuring a four-head, four-platen design with a three-step clean process. It reliably meets 7nm tech requirements, providing development and production flexibility, and best-in-class reliability and cost of ownership.Documents
No documents
EBARA
F-REX300S
Verified
CATEGORY
CMP
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
34636
Wafer Sizes:
Unknown
Vintage:
Unknown
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Logistics Support
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Money Back Guarantee
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Transaction Insured by Moov
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View AllEBARA
F-REX300S
Verified
CATEGORY
CMP
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
34636
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Application: Oxide Polisher: 4 polish turn table Top Ring:AI head GII x4 Load/Unload port:3 Load ports Endpoint: TCM / Optical(S-OPM) Equipped on table B and D Slurry Delivery : Flow control valve With CLC Lines each table AMHS: OHT Operation panel: 3 Touch panels Cleaner module : 3 cleaner and 1 dryer stations Cleaner Type: Horizontal Type Dryer: Spin Rinse DrOEM Model Description
The Ebara FREX 300 S is a 300mm CMP system, featuring a four-head, four-platen design with a three-step clean process. It reliably meets 7nm tech requirements, providing development and production flexibility, and best-in-class reliability and cost of ownership.Documents
No documents