Used SEN CORPORATION / SUMITOMO NV GSD HE for Sale

Description

No description

Configuration

o Utility Configuration o Line Power  Input: 480VAC/3P, 60Hz, 87KVA  Output: 1MeV, 1mA o Weight: 30,000lbs/13,600kg End-station Module o Mini Environment: DEXON with Air Circulation Curtain c-2. ATM Robot: Axcelis Standard ATM Robot o Notch/Flat Finder: Notch o Dummy Cassette: 1 o Load Buffer: 2 o Vacuum Cassette: 1 o Cassette Table: 4 o Load Port Interface: N/A c-9. Beam Profile Oscilloscope: 1 o Cell Controller: 133 o Load-lock Type: GSD 100/200, HE c-12. Main SUN Computer: SPARC Station 5 c-13. Main Monitor: Yes o Second SUN Computer: N/A c-15. Second SUN Monitor: N/A c-16. Tape Reader: N/A o Printer: N/A Process Module o Disk: NV-GSD-200 Segment Type o Faraday Flag: Yes o Electron Shower: Yes o Ar/Xe Bleed MFC: N/A o In-Vac Arm: Yes o Wafer Holder: Yes o Gyro: Yes o Linear Drive: Yes o Rotary Drive: Direct Drive • HV Power Supply: Advance Hivolt • HV Stack: OL8000/104/05, 100kV • ost Accel. Volt: Max. 1 MeV Extraction Suppression PS: 1 • AMU BSL • AMU PS: EMI EMS 40-150 • Hall Probe: AMU/FEM • Linac System: HE Standard • Resonator: 10 • RF Power Supply: AE 3155038-001 x 2ea. / AE 3155038-004 x 8ea. QUAD Power Supply: GHI PS/Dual Output x 5ea. • FEM: BSL • FEM Power Supply: EMI EMS 30-165 x 2ea. • Source Head: ELS • Filament PS: EMI EMS 10-60 • Arc PS: EMI EMS 150-7 • Cathode PS: Yes • Vaporizer PS: N/A • Source Magnet: Standard • Source Magnet PS: EMI EMS 25-25 • Source Bushing: Yes • Extraction Assembly: HE • Vaporizer: N/A Gas Box Module • Gas Box Type: GSD-100, 80kV • Gas Loop #1: Ar, HP • Gas Loop #2: BF3, HP • Gas Loop #3: AsH3, SDS • Gas Loop #4: PH3, SDS • Loop #1 MFC: MKS 1179A, Ar, 5sccm • Loop #2 MFC: MKS 1179A, N2, 10sccm • Loop #3 MFC: MKS 1640A, AsH3, 5sccm • Loop #4 MFC: MKS 1640A, PH3, 5sccm Vacuum System • P1/Source Turbo: LH, TurboVac 1000C • P1 Controller: LH, Turbotronik NT1000/1500VH h-3. P2/Resolving Cryo Pump: CTI OB-8 • P3/V3 Cryo Pump: CTI OB-10 • P4/Linac Turbo (Right): LH, TurboVac 1000C • P4 Controller: LH, Turbotronik NT1000/1500VH h-7. P5/Linac Turbo (Left): LH, TurboVac 1000C • P5/Controller: LH, Turbotronik NT1000/1500VH h-9. P8/Beam Guide Turbo: LH, TurboVac 1000C • P8 Controller: LH, Turbotronik NT1000/1500VH h-11. P9/Disk Cryo Pump: CTI OB-250F • RP1: N/A • RP2: N/A • RP4: N/A • IG1: Axcelis 3300002 • IG2: Axcelis 3300002 • IG3: Axcelis 3300002 • IG4: Axcelis 3300002 Safety Options • VESDA: N/A • Smoke Detector: N/A • CES Options: N/A Others • Enclosures: OK • Ground Bar: 3pcs. • Door Lock Keys: 3ea. • Drawings/Manuals: N/A Sub System • Tripple Loop Chiller • Sanei Giken Co., Ltd. Model: TCW50K4ACLS/SE-A • Compressor-1 • CTI Model: 9600 • Compressor-2 • CTI Model: 9600

OEM Model Description

The SEN Corporation / Sumitomo NV-GSD-HE is a globally recognized high-energy ion implantation system designed for 200mm, 150mm, and 125mm wafers, offering exceptional productivity in the energy range of up to 3 MeV. It supports an energy range between 10 keV and 3,000 keV, providing increased acquisition energy and improved efficiency through RF acceleration using RF resonators. The system features enhanced beam current at high energy levels due to optimized mass analyzing magnet and FEM (Final Energy Magnet). For higher implantation efficiency, it offers the option of installing a CVA (Continuous Variable Aperture). The NV-GSD-HE ensures high accuracy of implantation and maintains high beam quality by minimizing metal contamination and cross-contamination. The optional VSD (Virtual Slit Disk) and TSDF (Triple Surface Disk Faraday) further reduce cross-contamination.