Used SEN CORPORATION / SUMITOMO NV 8250HT for Sale

Description

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Configuration

General System Info/Select or Fill In Number of Cassettes : 02 Loading Configuration : SMIF Software Version : 5.1.3 User ID: EES Sun SPARCStation Version : Ultra Work Station SPC Productivity Software : Yes Auto Startup and Computer Monitoring : Yes Is System On-Line? Yes Off-Line Date (if applicable) : NA CE Mark Certified? No Electrical Requirements : 208V / 100A Can Produce Wafers AS IS? Yes Any Known Field Modifications? 1. Ultra Work Station All Cables Present? Yes GEM/SECS Interface : Yes SECS II Interface : Yes Box 2 System Configuration/Model Type Mid Current : NV-8250HT Energy Range : 250KeV Box 3 Key Common Options/Included? Clean Room Manuals : Yes (Shared) Standard Manuals : Yes (Shared) Fab Starter Kit : No Fast Maintenance Kit : Yes Box 4 Wafer Handling Automatic Flat or Notch Alignment Capability w/buffer cassette : Yes Programmable flat orient : Yes Wafer Rotation : Yes Slot-to-Slot Wafer Integrity (200mm only) : Yes Programmable Auto Tilt : 0-60 deg ESC : Yes Box 5 Machine Configuration Remote Monitor : Yes Single Stage Extraction : 15-40kV Ion Source Type : ELS Source Material Type : Moly Vaporizer : Dual NV-8250 Energy Filter System : Yes NV-8250 Target Positioning/Scanning System : Yes Signal Tower : No On-Board Cryos : Yes Beamline and Source Pumps Source Pump : Pfeiffer Beam Line Pump : Pfeiffer End Station Pump : Pfeiffer Box 6-Gas Configuration Gas Type MFC Type and Model BF3 UNIT-1662 SDS PH3 UNIT-1662 SDS AsH3 UNIT-1662 SDS InCl3 UNIT-1662 Solid Box 7-Suppor Equipment Key Common Options Cyro Compressors : Yes Manufacturer/Model : CTI-9600 Quantity : 01 Vacuum Pumps : Yes Pump Type : Dry Manufacturer/Model : Pfeiffer Quantity : 01 Remote Disk Chiller : Yes Mfg and Model : Affinity Scrubber : 01 Manufacturer/Model : CS Clean CS195DC