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CDE ResMap 178
Created On
October 12th, 2021
Guaranteed Accurate as of
4 months ago
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October 12th, 2021
4 months ago
Copied!
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Product ID
46839
Make
CDE
Model
ResMap 178
Category
Metrology
Serial Number
-
Vintage
-
Wafer Size
8"/200mm
Condition
As-Is
Other Information
Configuration
The resistivity range is 2mOhm/Square to 5MOhm/square. Contour plots, 3D plots, histograms, data exporting are supported from the Windows XP based control system.
Type Table Top
Wafer load Manual
Wafer size 2” to 8”
Mini Environment N/A
Probe Changer N/A
Aligner N/A
Size 12” x 19” x 10”
Range 1mΩ/☐ to 10MΩ/☐
Accuracy 0.5%
Repeatability 0.02% static
Repeatability 0.1% dynamic
Description
CDE Resistivity RESPROBE
The CDE Resmap 4 point resistivity mapper is used for measuring resistivity across the wafer for substrates and thin films deposited in the facility.
Listings information displayed on Moov.co is not a representation or warranty of any kind, and has been provided to us or extracted directly from the various suppliers and sources. Unless stated otherwise, Moov has not independently verified this information.
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