Back to Previous

ATV TECHNOLOGY SRO 704

Created On
March 1st, 2019
Guaranteed Accurate as of
7 days ago
Copied!
Share
March 1st, 2019
7 days ago
Copied!
Share
Product ID
21784
Make
ATV TECHNOLOGY
Model
SRO 704
Category
General PCB / SMT Equipment
Quantity
1
Serial Number
-
Vintage
-
Wafer Size
-
Condition
As-Is
Other Information
Configuration
Trion Technology Sirus T2 Tabletop RIE Reactive Ion Etcher. Plasma etching system designed to etch dielectrics and other films that require fluorine-based chemistries. Processes have been developed for etching silicon, silicon dioxide, silicon nitride, quartz, polyimide, tantalum, tungsten and other materials. Small footprint and robust design make it ideal for the lab environment. Good profile control, high sensitivity and good uniformity. 200mm bottom electrode. PC interface with touchscreen. Four MFC gas inputs, previous gases used AR, SF6, O2, CF4. Automatic tuning with 13.56 MHz 600W RF generator. Automatic pressure control package. Includes recirculating chiller. Turbo pump and roughing pump included. Endpoint detection in photo can be added at additional price. Year of Mfg.: 2011. Very Nice Condition.
Description
-
Listings information displayed on Moov.co is not a representation or warranty of any kind, and has been provided to us or extracted directly from the various suppliers and sources. Unless stated otherwise, Moov has not independently verified this information.
Services Available for this Listing
Moov Insurance
Installation
Refurbished
Various / Other
Similar Tools
OEM Model Description
-