Description
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- Model: Mirra 3400 - Currently Configured for 200mm Wafers - Titan Heads - 3 Zones (Inner Tube / Membrane / Retaining Ring) - ISRM Installed on all three platens - Controller Type: 5201 - ISRM Endpoint software version IB11H2 - Peristaltic pumps, (2) per platen - Nova patterned recognition unit, noneOEM Model Description
The Mirra® is a state-of-the-art CMP system that offers a flexible platform for process development and efficient manufacturing. Its unique four-head/three-platen design and advanced features such as the Titan Head™ wafer polishing carrier and the In-situ Rate Monitor™ (ISRM™) offer superior process control and flexibility while enabling system throughput of more than 50 wafers per hour. The Titan Head delivers consistent world-class within-wafer uniformity and repeatability with minimum edge exclusion over a wide range of process conditions. The ISRM detects film thickness changes during polishing, for highly accurate, real-time process control that allows the user to precisely define material removal and thus, process endpoint. The Mirra system is the answer for the full range of emerging CMP requirements, including compatibility with different cleaning systems and factory-automated buffering.Documents
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APPLIED MATERIALS (AMAT)
MIRRA
Verified
CATEGORY
CMP
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
50988
Wafer Sizes:
8"/200mm
Vintage:
2001
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Logistics Support
Available
Money Back Guarantee
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Transaction Insured by Moov
Available
Refurbishment Services
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APPLIED MATERIALS (AMAT)
MIRRA
Verified
CATEGORY
CMP
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
50988
Wafer Sizes:
8"/200mm
Vintage:
2001
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
- Model: Mirra 3400 - Currently Configured for 200mm Wafers - Titan Heads - 3 Zones (Inner Tube / Membrane / Retaining Ring) - ISRM Installed on all three platens - Controller Type: 5201 - ISRM Endpoint software version IB11H2 - Peristaltic pumps, (2) per platen - Nova patterned recognition unit, noneOEM Model Description
The Mirra® is a state-of-the-art CMP system that offers a flexible platform for process development and efficient manufacturing. Its unique four-head/three-platen design and advanced features such as the Titan Head™ wafer polishing carrier and the In-situ Rate Monitor™ (ISRM™) offer superior process control and flexibility while enabling system throughput of more than 50 wafers per hour. The Titan Head delivers consistent world-class within-wafer uniformity and repeatability with minimum edge exclusion over a wide range of process conditions. The ISRM detects film thickness changes during polishing, for highly accurate, real-time process control that allows the user to precisely define material removal and thus, process endpoint. The Mirra system is the answer for the full range of emerging CMP requirements, including compatibility with different cleaning systems and factory-automated buffering.Documents
No documents