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AMAT / APPLIED MATERIALS CENTURA AP ENABLER

Created On
November 9th, 2019
Guaranteed Accurate as of
3 months ago
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November 9th, 2019
3 months ago
Favorite
Copied!
Share
Make
AMAT / APPLIED MATERIALS
Model
CENTURA AP ENABLER
Category
Etchers & Ashers
Quantity
1
Serial Number
-
Vintage
-
Wafer Size
12"
Condition
As-Is
Other Information
Configuration
Process: OX From original tool PO, please inspect to verify Software Revision: B2.8_79FI Software: FB4.70_12GEM Software: 7.20_17Wafer Size: Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, NotchOnline Connection: GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)Inter Face: 3 carrier stage (Continuous flow operation) w/ 3 Loadports (Semi compliant MENV and FMS assembliesInterface A: Hardware related to EDACorrosion Resistant FI & SWLL: N/ALoader Mod Corrosion Prevent: N/AStandard SWLL: Standard SWLLSide Storage Pod: Side Storage Pod (Left/Right)OCR: KIT, YAT BACKSIDE OCR, 300MM 5.3FIFacility Plate: N2 Regulator : Supplied by customer in floor, CDA regulator 125 PSI onboard SMC pressure switchFacility Plate: Manual Valve : Supplied by customer in floorFacility Plate: Pressure Gauge : Supplied by customer on regulator in floorTransfer Pressure Monitor: 10 Torr Manometer and 1SLM N2 APC, kitTransfer Pressure Monitor: GAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analogLoad Lock Pressure Monitor: GAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analogTransfer Chamber Blade Kit: Transfer Chamber Accelerator Blade KitLL ISO-Slit Valve Grp Elast.: AP Chemraz 513 ElastomerAtmospheric Robot: KAWASAKI A3Mainframe Robot: VXP with Dual bladeWafer Pass Through: Not availableLoadport type: Enhanced 25 wafer FOUPLoadports: Loadport SystemOpen Cassettes Supported: N/AWater Leak Detector: ConfiguredEMO Type: Turn to Release (Front x3, Rear x4) - 3 on FI, 1 on front of FI and one on each side of FI. Rear: 1 for each process chamber.System Monitors: Monitor #1 is Flat Panel with Keyboard on stand / Monitor #2 is through the wall flat panel (optional)Cable Length: RF Cable : 2 cables 75 ft; 1Short CableCable Length: Mnitor Cable : 25 Ft 16ft effectiveCable Length: Pump Cable Length : 75 ft interface cableSignal Tower: Red/Yellow/Green/Blue ( Front x1 & Center section of loadside and maintenance side x1)DNET LIGHT TOWER, 4 LIGHT COVER (RAGB) W/ CLR DAUGInter Lock: On board interlocks to dissable RFand gas flow at 1/2 atmos., and lid or gas panel door open.Inter Locks: On board interlocks to disable robots and slit doors when transfer lid or load lock lids are open.Certificate of Cleanliness: N/ARemote UPS Interface: N/AScrubber Interlock: N/AEtch Common AC Rack: Lean AC Rack"Chiller (wall/source): NX20A(ZT150 coolant)0190-17815"Chiller (Dual Zone Cathode): NX20A (ZT130 coolant)"Coolant: Galden ZT-130 for CathodeGalden ZT-150 for Wall/SourceGalden FC-3283 for Cathode/Wall/Source"Chiller Hose Length: 75'RF Gen TOP (162Mhz Source): 3500W RF POWER SUPPLY, 162 MHZ, FIXED FREQUENCY, 208VAC, WATER COOLED (0190-29389)"RF Gen #1 Bottom (13Mhz Bias): RF GENERATOR, 13MHZ 5KW, 300MM, RACK MOUNT)0190-15319""RF Gen #2 Bottom (2 Mhz Bias): RF GEN PLASMA 9KW 2MHZ ENI)0190-29586""RF Match: Y(0190-25187)"IPUP Type: Alcatel A100L (0190-01042)Process Chb.1,2,3,&4: (IAEF) Enabler (Front End-E5)Endpoint type (Eye-D): Endpoint type (Eye-D)(0246-00196)Plasma State Monitor: Plasma State Monitor (1 per system) (0190-17948)Spectrograph: EyeD HP Spectrongraph (0190-28658)ESC type (Dual Zone): ESC type (Dual Zone) (0010-33416)Cathode Base: Non-Anodized (0041-05779)Cathode N2 Purge: Cathode N2 Purge - YesL-collar Si Insert Ring: L-collar Single Crystal Si Insert Ring 1.5mm step TMP: Shimadzu D3403M, 3000 litreTMP Back Pressure Monitor: 51A11TGA2BA003 (MKS) Foreline TransducerDry Pump: N(ESR80WN (EBARA) ; customer Supply)Final Valve, Heater: N/AWfib: Y(Wfib - Mod (Restriction at RTN))APC: VALVE THROTTLE GATE VF250-HA WITH NEW CLOSED POSITION SENSORSlit Valves: Anodized (AL) 513 ChemrzPressure Monitor: 1,000 mt HeadPressure Monitor: 100 mt HeadPressure Monitor: Transducer 100 Torr Cal TankPressure Monitor: Chamber ATM Switch : 51A13TGA2AA720 (MKS)Pressure Monitor: Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas Switch flow through 600TorrChamber Controller Module: SBC C400MHZ, 3U CPCI, 256MB RAMFES Server: FES ServerNSR# 621632-0: Enabler Chamber FRCII, ratio 1000/1000NSR# 621638-0: Chamber First in Fab for IADB Enabler ChamberNSR# 621633-0: Transforma run to run optionThottle Gate Valve (TGV): Throttle Gate Valve (TGV) - Ceramic Gas Line 1: Gas line 1- C4F6 100 sccm UNIT IFC-125Gas Line 2: Gas line 2- CH2F2 100 sccm UNIT IFC-125Gas Line 3: Gas line 3- C3F8 50 sccm UNIT IFC-125Gas Line 4: Gas line 4- O2_M 300 sccm UNIT-125Gas Line 5: Gas line 5- SO2 200 sccm UNIT IFC-125Gas Line 6: Gas line 6- CF4 200 sccm UNIT IFC-125Gas Line 7: Gas line 7 - C4F6_IGI 5 sccm UNIT-125Gas Line 8: Gas line 8 - O2_IGI 5 sccm UNIT-125Gas Line 9: Gas line 9- O2_L 50 sccm UNIT-125Gas Line 10: Gas line 10- O2_H 5000 sccm UNIT-125Gas Line 11: Gas line 11- Ar 2000 sccm UNIT-125Gas Line 12: Gas line 12- N2 200 sccm UNIT-125Gas Line 13: Gas line 13- CHF3 200 sccm UNIT-125Gas Line 14: Gas line 14- C4F8 100 sccm UNIT-125Gas Pallet Type: NextGenGas Pallet: ASSY, FULL 6/1/1/6 PALLET, 300MM ETCH NEXT GENRegulators: Regulator on SLD (Inlet to Gas Pannel, 1 per unique gas, 12 max, VCR connection)Valves: CKDTransducers: Transducers inside MFC'sFlow Ratio Controller (NSTU): Flow Ratio Controller (NTSU)IGI Interlock: N/AFilters: MYKROLIS (nickel, VCR, P/N 4020-01285), Nippon (VCR 12 max, P/N 4020-00084)Gas Leak Detection Port: External Connection PointGas Panel Exhaust: Top ExhaustGas Panel Facilities Hook Up: Single Line DropPiping: Standard high purity stainless & Exhaust through Gas boxFinal Pressure Switch: At 600 Torr coming from gas pallet, At chambers swithch pressure signal 10 torr half atmospherePurge: N2 (Process Grade N2)L-collar Single Crystal Si: L-collar Singe Crystal Si Insert Ring 1.5mm stepSource Bottom Ring: QUARTZ RING SOURCE, E5(0200-07362)Quartz Barrier Ring: Quartz Barrier Ring (0200-03170)TGV o-ring: TGV o-ring (3700-03701)TGV Hard Stop - Ceramic: TGV Hard Stop - CeramicTGV Pads: TGV Pades (0041-03304)Source Chiller Bypass: Source Chiller Bypass Annular Baffle Heated: Annular Baffle Heated Cover, Lower Liner: Cover, Lower LinerUpper Liner: SUPPORT LINER (0040-37601)Process Kit: Process Kit"Showerhead Assy: Showerhead Assy, 4mm SiC Top Electrode Tokai (0041-32335)"Aluminum shims: Polymer Shims(0242-55460)Plasma Containment Door: Plasma Containment Door Damage/Missing parts listPlease inspect tool to reconfirmDry pumps and customer provided items not included on sales
Description
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Model Description
-
Services Available for this Listing
Moov Insurance
Installation
Refurbished
Various / Other
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