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AMAT / APPLIED MATERIALS CENTURA AP ENABLER

Created On
June 22nd, 2019
Guaranteed Accurate as of
2 months ago
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June 22nd, 2019
2 months ago
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Copied!
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Make
AMAT / APPLIED MATERIALS
Model
CENTURA AP ENABLER
Category
Etchers & Ashers
Quantity
1
Serial Number
-
Vintage
-
Wafer Size
12"
Condition
As-Is
Other Information
Configuration
Process: OX Tool config is based on original PO, please verify tool details at tool inspection Software Revision    B2.8_79     FI Software    FB4.70_12     GEM Software    7.20_17     Wafer Size    Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch     Online Connection    GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)     Inter Face    3 carrier stage (Continuous flow operation) w/ 3 Loadports (Semi compliant MENV and FMS assemblies     Interface A    Hardware related to EDA    OPT: Site selectable item. NOTE: This may be a cost bearing item. Corrosion Resistant FI & SWLL    N/A     Loader Mod Corrosion Prevent    N/A     Standard SWLL    Standard SWLL     Side Storage Pod    Side Storage Pod (Left/Right)    Can be configured on the right if necessary for tool clearance issues. OCR    KIT, YAT BACKSIDE OCR, 300MM 5.3FI     Facility Plate    N2 Regulator : Supplied by customer in floor, CDA regulator 125 PSI onboard SMC pressure switch     Facility Plate    Manual Valve : Supplied by customer in floor     Facility Plate    Pressure Gauge : Supplied by customer on regulator in floor    N/A Transfer Pressure Monitor    10 Torr Manometer and 1SLM N2 APC, kit     Transfer Pressure Monitor    GAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analog     Load Lock Pressure Monitor    GAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analog     Transfer Chamber Blade Kit    Transfer Chamber Accelerator Blade Kit     LL ISO-Slit Valve Grp Elast.    AP Chemraz 513 Elastomer     Atmospheric Robot    KAWASAKI A3     Mainframe Robot    VXP with Dual blade     Wafer Pass Through    Not available     Loadport type    Enhanced 25 wafer FOUP     Loadports    Loadport System     Open Cassettes Supported    N/A     Water Leak Detector    Configured     EMO Type    Turn to Release (Front x3, Rear x4) - 3 on FI, 1 on front of FI and one on each side of FI. Rear: 1 for each process chamber.     System Monitors    Monitor #1 is Flat Panel with Keyboard on stand / Monitor #2 is through the wall flat panel (optional)     Cable Length    RF Cable : 2 cables 75 ft; 1Short Cable    2 cables/chamber are 75'; 1 cable is short (within chamber) Cable Length    Mnitor Cable : 25 Ft 16ft effective     Cable Length    Pump Cable Length : 75 ft interface cable     Signal Tower    Red/Yellow/Green/Blue ( Front x1 & Center section of loadside and maintenance side x1)DNET LIGHT TOWER, 4 LIGHT COVER (RAGB) W/ CLR DAUG     Inter Lock    On board interlocks to dissable RFand gas flow at 1/2 atmos., and lid or gas panel door open.    1/chamber Inter Locks    On board interlocks to disable robots and slit doors when transfer lid or load lock lids are open.    Reason-There are maintenance routines or wafer recovery procedures that will require the ability to open the lid and operate the slit valves or robot Certificate of Cleanliness    N/A    Required in Fab 7 only. Remote UPS Interface    N/A    Required in Fab 7 only. Scrubber Interlock    N/A    Required in Fab 7 only Etch Common AC Rack    Lean AC Rack     Chiller (wall/source)    "NX20A(ZT150 coolant) 0190-17815"    NOTE: Coolant not shipped with tool. Chiller (Dual Zone Cathode)    NX20A (ZT130 coolant)    NOTE: Coolant not shipped with tool. Coolant    "Galden ZT-130 for Cathode Galden ZT-150 for Wall/Source Galden FC-3283 for Cathode/Wall/Source "    NOTE: Coolant not shipped with tool. Chiller Hose Length    75'    Dual Channel Chiller (U.S. sites use 50' RF Gen TOP (162Mhz Source)    3500W RF POWER SUPPLY, 162 MHZ, FIXED FREQUENCY, 208VAC, WATER COOLED (0190-29389)    Option 10 RF Gen #1 Bottom (13Mhz Bias)    "RF GENERATOR, 13MHZ 5KW, 300MM, RACK MOUNT) 0190-15319"     RF Gen #2 Bottom (2 Mhz Bias)    "RF GEN PLASMA 9KW 2MHZ ENI) 0190-29586"     RF Match    "Y (0190-25187)"     IPUP Type    Alcatel A100L (0190-01042)     Process Chb.1,2,3,&4    (IAEF) Enabler (Front End-E5)     Endpoint type (Eye-D)    Endpoint type (Eye-D)(0246-00196)     Plasma State Monitor    Plasma State Monitor (1 per system) (0190-17948)     Spectrograph    EyeD HP Spectrongraph (0190-28658)     ESC type (Dual Zone)    ESC type (Dual Zone) (0010-33416)     Cathode Base    Non-Anodized (0041-05779)     Cathode N2 Purge    Cathode N2 Purge - Yes     L-collar Si Insert Ring    L-collar Single Crystal Si Insert Ring 1.5mm step      TMP    Shimadzu D3403M, 3000 litre     TMP Back Pressure Monitor    51A11TGA2BA003 (MKS) Foreline Transducer     Dry Pump    N(ESR80WN (EBARA) ; customer Supply)     Final Valve, Heater    N/A     Wfib    Y(Wfib - Mod (Restriction at RTN))     APC    VALVE THROTTLE GATE VF250-HA WITH NEW CLOSED POSITION SENSOR     Slit Valves    Anodized (AL) 513 Chemrz     Pressure Monitor    1,000 mt Head     Pressure Monitor    100 mt Head     Pressure Monitor    Transducer 100 Torr Cal Tank     Pressure Monitor    Chamber ATM Switch : 51A13TGA2AA720 (MKS)     Pressure Monitor    Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas Switch flow through 600Torr     Chamber Controller Module    SBC C400MHZ, 3U CPCI, 256MB RAM     FES Server    FES Server     NSR# 621632-0    Enabler Chamber FRCII, ratio 1000/1000    FRCII NSR# 621638-0    Chamber First in Fab for IADB Enabler Chamber    1st tool to a fab only NSR# 621633-0    Transforma run to run option    option-not configured Thottle Gate Valve (TGV)    Throttle Gate Valve (TGV) - Ceramic      Gas Line 1    Gas line 1- C4F6 100 sccm UNIT IFC-125     Gas Line 2    Gas line 2- CH2F2 100 sccm UNIT IFC-125     Gas Line 3    Gas line 3- C3F8 50 sccm UNIT IFC-125     Gas Line 4    Gas line 4- O2_M 300 sccm UNIT-125     Gas Line 5    Gas line 5- SO2 200 sccm UNIT IFC-125     Gas Line 6    Gas line 6- CF4 200 sccm UNIT IFC-125     Gas Line 7    Gas line 7 - C4F6_IGI 5 sccm UNIT-125     Gas Line 8    Gas line 8 - O2_IGI 5 sccm UNIT-125     Gas Line 9    Gas line 9- O2_L 50 sccm UNIT-125     Gas Line 10    Gas line 10- O2_H 5000 sccm UNIT-125     Gas Line 11    Gas line 11- Ar 2000 sccm UNIT-125     Gas Line 12    Gas line 12- N2 200 sccm UNIT-125     Gas Line 13    Gas line 13- CHF3 200 sccm UNIT-125     Gas Line 14    Gas line 14- C4F8 100 sccm UNIT-125     Gas Pallet Type    NextGen     Gas Pallet    ASSY, FULL 6/1/1/6 PALLET, 300MM ETCH NEXT GEN     Regulators    Regulator on SLD (Inlet to Gas Pannel, 1 per unique gas, 12 max, VCR connection)    Includes independent O2 line Valves    CKD     Transducers    Transducers inside MFC's     Flow Ratio Controller (NSTU)    Flow Ratio Controller (NTSU)    Located in gas panel. IGI Interlock    N/A    Can flow two at a time. Filters    MYKROLIS (nickel, VCR, P/N 4020-01285), Nippon (VCR 12 max, P/N 4020-00084)     Gas Leak Detection Port    External Connection Point     Gas Panel Exhaust    Top Exhaust     Gas Panel Facilities Hook Up    Single Line Drop     Piping    Standard high purity stainless & Exhaust through Gas box     Final Pressure Switch    At 600 Torr coming from gas pallet, At chambers swithch pressure signal 10 torr half atmosphere     Purge    N2 (Process Grade N2)     L-collar Single Crystal Si    L-collar Singe Crystal Si Insert Ring 1.5mm step    Consumable Kit Source Bottom Ring    QUARTZ RING SOURCE, E5(0200-07362)    Consumable Kit Quartz Barrier Ring    Quartz Barrier Ring (0200-03170)    Consumbable Kit TGV o-ring    TGV o-ring (3700-03701)    Consumable Kit TGV Hard Stop - Ceramic     TGV Hard Stop - Ceramic     TGV Pads    TGV Pades (0041-03304)    Swap Kit Parts Source Chiller Bypass    Source Chiller Bypass      Annular Baffle Heated    Annular Baffle Heated     Swap Kit Parts Cover, Lower Liner    Cover, Lower Liner    Swap Kit Parts Upper Liner    SUPPORT LINER (0040-37601)    Swap Kit Parts Process Kit    Process Kit    Process Kit Parts Showerhead Assy    "Showerhead Assy, 4mm SiC Top Electrode  Tokai (0041-32335)"    Process Kit Parts Aluminum shims    Polymer Shims(0242-55460)    Process Kit Parts - Use Thin Shims. Plasma Containment Door    Plasma Containment Door    Process Kit Parts Missing/Damaged Parts List: Dry pumps are not included with sales Please inspect tool to reconfirm    
Description
-
Model Description
-
Services Available for this Listing
Moov Insurance
Installation
Refurbished
Various / Other
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