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AIXTRON CRIUS II
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:46625

    Wafer Sizes:Unknown

    Vintage:2010

    Description

    No description available

    Configuration

    ( 55 x2") Configuration Process GaN Batch size 2" * 55ea/ 4" * 13ea/ 6" * 6ea Electricity 208/ 120V AC,3 Phase Heater Voltage 380V AC,3 Phase Wiring 4 wire + Ground Temperature Monitor ARGUS x1 Hydride Lines NH3_1 / NH3_2 / SiH4 MO Source TMGa-1,TMGa-3,TEGa2, Cp2Mg-1, Cp2Mg-2, TMIn-1, TMAl-1 (7) Bath 2 sets of RE235 RAUDA bath 4 sets of NOAH Precision MFC Type Horiba Z500 Pump Scroll pump*1 Chiller Affinity

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    OEM Model Description

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