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Marketplace > Thermal Evaporators > FERROTEC / TEMESCAL > FC 1800
FERROTEC / TEMESCAL FC 1800
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:22863

    Wafer Sizes:Unknown

    Vintage:Unknown

    Description

    No description available

    Configuration

    Temescal FC-1800 Load-Locked Electron Beam Evaporator with Substrate Heaters. Used thin film deposition system. This fast cycle load-locked evaporator brings the bell jar down to operator level without sacrificing the throw distance. Cryo pumped high vacuum system with roughing pump. 4 pocket gun with Temescal CV-8 power supply. Inficon IC4 Desposition monitor. Bell Jar: 19-1/2 in. ID. Single substrate dome 17 in. dia. with rotation control. Includes substrate heaters. Auto valve sequencer.

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