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ALLWIN21 / AG ASSOCIATES HEATPULSE  610
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:17978

    Wafer Sizes:Unknown

    Vintage:Unknown

    Description

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    Configuration

    AG Associates 610 Rapid Thermal Processor. Benchtop system for rapid thermal processing of semiconductor wafers up to 6 in. dia. (depends on wafer tray). Programmable ramp up rates. Peak Temp.: 1350 deg C. Steady State Temp. Range: 400 to 1150 deg C. 208V, 1 Ph, 60 Hz, 100A.

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