Tool was configured for Hot temperature range function.
X,Y Overall Accuracy:±2.0μm (Temp Stability ±1\0 X,Y Stage Accuracy:±1.0μm
Z Axis Stroke(Applicable stroke):37mm
Z Axis Control Accuracy:±2μm
Stage Durability:200kgf Hot chuck
Temp. Range:50 to 150\0
Tool was docked with a JEC P2000A tester. INCLUDING A HINGE UNIT (MHF4000).
Tool has been de-installed by the OEM.
Tool is currently located in an off-site warehouse.