CHA MARK 40

9600 Series Brooks Cryopump Compressor Ebara A10S Mechanical Dry Pump Cryo-Torr 10 Model Brooks CTI cryopump Telemark 10kV,10kW, 750mA Analog Power TT Cabinet Model D(T3) 22x 4 inch wafer lift off dome 4x 6 inch wafer lift off dome 8x 4 inch wafer lift off dome 3x Shadow evaporation domes Single QCM sensor Single shutter design Six-pocket evaporation source 2x internal shield set, second set to follow after cleaning Inficon IC5 Deposition controller Computer software control by Semicore Equipment Inc, based on Think&Do machine automation platform, Windows XP operating system Granville Phillips model 307 Vacuum gauge controller. Telemark TT10 power controller Telemark programmable sweep controller Watlow substrate heat lamp controller (Lamps not functional based on current user needs) 1500 AVR computer uninterruptable power supply

CHA Mark 40 electron beam evaporator with Think&Do machine automation platform, refurbished by Semicore Equipment, Inc. The six-pocket electron gun allows for growing multilayer films without breaking vacuum between species, and is currently in operation in a shared user facility. The evaporator automation system will need to be replaced in order to run automatic processes, but does operate in a manual control mode. Available as-is in early August 2022.

Vacuum deposition systems offering efficiency, flexibility Dual Operation, Sputtering and Evaporation Moving substrates Exceptional Film Uniformity (Fixture Dependent) Sputter Up Process Stations