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KLA HRP-340

Created On
October 26th, 2021
Guaranteed Accurate as of
6 days ago
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October 26th, 2021
6 days ago
Copied!
Share
Product ID
47698
Make
KLA
Model
HRP-340
Category
Metrology
Quantity
1
Serial Number
-
Vintage
-
Wafer Size
-
Condition
As-Is
Other Information
Configuration
-
Description
-
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Services Available for this Listing
Moov Insurance
Installation
Refurbished
Various / Other
Similar Tools
OEM Model Description
KLA-Tencor HRP 340 is among the most production worthy metrology solutions in 300mm segment, supporting the most advanced applications including: etch, CMP, and C4 bump monitoring, and more. The 340 series configurations are designed to meet cost, performance, and automation requirements and can be configured as a single open cassette, or dual FIMS for stringent particle requirements. The system utilizes KLA-Tencor's proprietary UltraLite sensor technology for maintaining constant tip-sample forces and vertical linearity over the full Z range. The HRP 340 featues a configurable piezo flexure sensor stage for high resolution scans.
Services Available for this Listing
Moov Insurance
Installation
Refurbished
Various / Other