Used ULVAC NE-950EX for Sale

Marketplace > Dry Etch > ULVAC > NE-950EX

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NE-950EX

Verified

Dry Etch

Last Verified:Over 60 days ago

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Key Item Details

Condition:Used

Operational Status:

Product ID:24162

Wafer Sizes:6"/150mm

Vintage:2011

Description

No description available

Configuration

Form : Load Lock Type Configuration : Atmospheric Transfer Chamber Load Lock Chamber Transfer Chamber Process chamber Transfer device : Bernoulli transport Substrate size : dia.330 trays (dia.150 Wafer × 3) Process Power : Antenna RF 2 kW (13.56 MHz) 　　　　　　　　　　　Bias RF 2 kW (12.5 MHz) Process Gas : 8 gas systems (CHF3, Cl2, BCl3, etc.) 　 Vacuum Pump : DRP × 2

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ULVAC