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MATTSON Aspen II

Created On
August 26th, 2020
Guaranteed Accurate as of
15 days ago
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August 26th, 2020
15 days ago
Favorite
Copied!
Share
Make
MATTSON
Model
Aspen II
Category
Etchers & Ashers
Quantity
1
Serial Number
-
Vintage
-
Wafer Size
-
Condition
As-Is
Other Information
Configuration
Aspen 2 ICP Dual chamber system RFPP RF-10S power generator X 4 RF matching box X 4 Ebara dry pumps : AA100 X 2, A07V X 1 GAS: O2 , N2, CF4 AC box and DC box ACX pressure controller X 2 Aspen 2 computer , include robot index PCB, Analog I/O PCBs, Digital I/O PCBs, CPU board, Hard disk /floppy disk driver. Shuttle, robot assy. arm, slit door, heater block , temperature controller, heater block, quartz tube, lift pin cylinder, throttle valves, Iso valves. No missing parts.
Description
-
Model Description
MATTSON Aspen II is Etchers & Ashers system. the Aspen II can be used with 8” wafer size.
Services Available for this Listing
Moov Insurance
Installation
Refurbished
Various / Other
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