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KLA / KLA-Tencor SURFSCAN 6200

Created On
February 23rd, 2021
Guaranteed Accurate as of
9 days ago
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February 23rd, 2021
9 days ago
Favorite
Copied!
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Product ID
32097
Make
KLA / KLA-Tencor
Model
SURFSCAN 6200
Category
Defect Inspection
Quantity
1
Serial Number
-
Vintage
-
Wafer Size
-
Condition
Refurbished
Other Information
Configuration
Substrate Sizes: 50mm(2"), 76mm(3"), 100mm(4"), 125mm(5"), 150mm(6"), 200mm(8") wafers • Substrate Material: Silicon or any opaque, polished surface which scatters less than 5% of incident light. • Defect Sensitivity: 0.10µm diameter PSL sphere equivalent with greater than 90% capture rate. • Haze Sensitivity: 0.02ppm • Haze Resolution: 0.002ppm • Repeatability: 0.5% at 1σ (mean count greater than 500, 0.364 µm diameter latex spheres) • Accuracy: ≥99% (verified with VLSI Standards) • Dynamic Range: 0.01µm to 9,999µm in a single measurement. • Throughput: Up to 100 w/hr using 150mm wafers • Cassette Handling: Single puck wafer handling from two cassette (one sender/receiver, one receiver) • Illumination Source: 30mW Argon-Ion laser, 488nm wavelength • Operator Interface: New LCD monitor, keyboard, mouse • Color coded defect maps, histograms, magnified views of individual defects. • Operation System and Software: Windows 98, ver. 4.2 • Manual
Description
• Instrument Dimensions: Height: 168 cm (66”) Width: 75 cm (29.5”) Depth: 77 cm (30.25”) • Instrument Weight: 240 kg (530 lbs) • Crate Dimensions: Height 196 cm (77”) Width: 112 cm (44”) Depth: 122 cm (48”) • Crate Weight: 460 kg (1010 lbs) • Vacuum: 508 mm (20 in.) Hg • Electrical: 220-240V, 50/60 Hz • Power Requirement: 2 kVA • Ducted Venting: Two 102 mm (4”) exhaust hoses • Environment: Class 10 or better
Services Available for this Listing
Moov Insurance
Installation
Refurbished
Various / Other
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OEM Model Description
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